Carrier-less Silicon Interposer with Photo-patterned Polymer Substrate

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Solution Overview

Problem

Current interposer structures and fabrication processes are inadequate for achieving compact, high-density interconnects between microelectronic elements with low impedance, which is essential for advanced portable devices and data servers, as they fail to effectively manage thermal expansion and mechanical stress.

Innovation Solution

A component with a first element of low thermal expansion material and a second element featuring electrically insulated structures separated by gaps, filled with insulating materials, and conductive interconnects that reduce stress and facilitate efficient electrical connections between terminals and conductive elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional interposer structures are used, then electrical connections between microelectronic elements can be established, but mechanical stress and thermal expansion issues arise that limit compactness and reliability

Engineering Contradiction:
Improvemechanical stress managementVSAvoidinterposer structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The interposer structure is segmented into multiple functional layers including a substrate layer, an insulating layer with through-holes, and a conductive layer. This segmentation allows each layer to independently manage specific functions (mechanical support, electrical insulation, electrical connection) thereby reducing overall mechanical stress while maintaining structural simplicity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The interposer employs composite material construction with a substrate having specific thermal expansion properties, combined with insulating materials filled in through-holes and conductive materials for interconnects. This composite approach enables tailored thermal and mechanical properties that reduce stress while keeping the overall structure compact and manageable

Inventive Principle:
Principle #40Composite materials

2Speed

If interconnect length is reduced to minimize signal propagation delays, then bandwidth improves, but manufacturing precision requirements increase

Engineering Contradiction:
Improvesignal propagation speedVSAvoidinterconnect alignment precision
Core Design Contradiction:
SpeedVSManufacturing precision

Solution Approach 1:

The insulating layer with pre-formed through-holes is created before depositing the conductive interconnect layer. This preliminary action establishes precise alignment guides for the conductive traces, enabling short interconnect lengths with minimal signal delay while maintaining manufacturability through standardized hole-patterning processes

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The interposer structure provides localized precision features through the through-hole patterns in the insulating layer, which serve as alignment references for conductive interconnect formation. This local quality enhancement allows precise interconnect placement without requiring extreme global manufacturing precision, enabling short trace lengths for high-speed signaling

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If photo patterned polymer is used as substrate, then manufacturing ease and cost are improved, but thermal expansion management becomes more challenging

Engineering Contradiction:
Improvesubstrate fabrication easeVSAvoidthermal expansion control
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The substrate is selected with specific thermal expansion parameters that match or complement the attached semiconductor devices. By carefully choosing polymer composition and cross-linking density, the thermal expansion coefficient is optimized to reduce thermal stress during processing and operation, while maintaining the manufacturing advantages of photo-patternable polymer substrates

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly reduces mechanical stress and signal propagation delays, enabling more compact and efficient interconnects with improved thermal performance, enhancing the bandwidth and reducing power consumption in complex electronic devices.

Implementation Method 1

a photo patterned polymer as substrate

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS10403510B2Method of fabricating a carrier-less silicon interposer using photo patterned polymer as substrate
Publication Date: 2019.09.03 ADEIA SEMICON TECH LLC
  • US10403510B2 patent drawing
  • US10403510B2 patent drawing
  • US10403510B2 patent drawing

AI summary

A component, e.g., interposer has first and second opposite sides, conductive elements at the first side and terminals at the second side. The terminals can connect with another component, for example. A first element at the first side can comprise a first material having a thermal expansion coefficient less than 10 ppm/.degree. C., and a second element at the second side can comprise a plurality of insulated structures separated from one another by at least one gap. Conductive structure extends through at least one insulated structure and is electrically coupled with the terminals and the conductive elements. The at least one gap can reduce mechanical stress in connections between the terminals and another component.