Carrier With Electro Permanent Magnetic Chuck For Display Deposition

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Solution Overview

Problem

The existing manufacturing processes for display apparatuses are time-consuming and costly due to the complexity of aligning and depositing layers, requiring multiple chambers and lengthy maintenance procedures.

Innovation Solution

A carrier system with an electro permanent magnetic chuck and magnetic force portion is used to align and transport a mask assembly and display substrate, simplifying the deposition process by fixing the mask assembly using the chuck and applying a magnetic force to position it accurately over the substrate, thereby reducing misalignment and process time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a mask assembly is arranged inside a deposition unit in a manufacturing apparatus of a display apparatus according to the related art, then the deposition process can be performed, but it takes a long time and many processes to input a display substrate and the mask assembly into the deposition unit

Engineering Contradiction:
Improvedeposition process efficiencyVSAvoidtime to input substrate and mask assembly
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent combines the mask assembly and display substrate onto a single carrier, allowing them to be transported together through the deposition unit. This merging of components eliminates the need for separate input processes, reducing the time and complexity of loading the deposition unit while maintaining efficient deposition operations

Inventive Principle:
Principle #5Merging (Combining)

2Adaptability or versatility

If a chamber that is additionally provided is to be used to form various layers, then layer formation can be achieved, but the method and the apparatus itself are complicated, requiring a long time and high costs for maintenance of the manufacturing apparatus

Engineering Contradiction:
Improvelayer formation capabilityVSAvoidapparatus structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The carrier is designed as a universal platform that can hold and transport both the mask assembly and display substrate simultaneously through the deposition unit. This multi-functional carrier eliminates the need for additional specialized chambers or complex handling mechanisms, reducing apparatus complexity while maintaining the ability to form various layers

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If the mask assembly is fixed on the carrier using the electro permanent magnetic chuck, then the mask assembly can be securely held and positioned, but the magnetic force may cause misalignment if not properly controlled

Engineering Contradiction:
Improvemask assembly fixation stabilityVSAvoidmask assembly alignment precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent incorporates a vision system that detects the position of the mask assembly and provides feedback to the control unit. The control unit adjusts the magnetic force applied by the electro permanent magnetic chuck based on this feedback, dynamically optimizing both the fixation stability and alignment precision of the mask assembly during the deposition process

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the deposition process, reduces misalignment, and allows for direct cleaning and maintenance of the mask assembly, leading to faster and more efficient layer deposition on the display substrate.

Implementation Method 1

an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix a mask assembly

Methodology Applied
Scientific EffectElectro permanent magnetic: Electropermanent Magnet

Implementation Method 2

a magnetic force portion arranged in the body portion and configured to apply a magnetic force such that the mask assembly approaches the display substrate

Methodology Applied
Scientific EffectMagnetic force: Magnetism

Data Source

PatentUS20230193450A1Carrier, apparatus for manufacturing display apparatus and including the carrier, and method of manufacturing display apparatus
Publication Date: 2023.06.22 SAMSUNG DISPLAY CO LTD
  • US20230193450A1 patent drawing
  • US20230193450A1 patent drawing
  • US20230193450A1 patent drawing

AI summary

A carrier, an apparatus for manufacturing a display apparatus and including the carrier, and a method of manufacturing a display apparatus are provided. The carrier includes a body portion; an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix a mask assembly; and a substrate fixing unit arranged in the body portion to selectively fix a display substrate.