Semiconductor Carrier Shuttle Storage for Faster Fab Transfer
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Solution Overview
Problem
Current semiconductor carrier storage systems face challenges in efficiently utilizing space, reducing costs, and minimizing transfer time within semiconductor fabrication lines, as they often rely on fixed pathways and equipment, limiting flexibility and increasing idle time and costs.
Innovation Solution
A semiconductor carrier storage system comprising multiple storage ports, a shuttle rail, an internal carrier shuttle with a transfer wheel and hoist, and upper/lower transfer ports, allowing for flexible storage and transfer of semiconductor carriers independent of overhead hoist transport systems, utilizing idle spaces and reducing dependency on existing infrastructure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a fixed overhead hoist transport system is used for carrier storage, then the transport pathway is stable and reliable, but the space usability is reduced and flexibility is limited
Solution Approach 1:
The system divides the carrier storage function into two independent parts: the existing overhead hoist transport system for reliable transport, and a new ground-level storage system with shuttle rail for flexible space utilization. This segmentation allows each subsystem to optimize for its specific function without compromising the other.
Solution Approach 2:
The internal carrier shuttle acts as an intermediary between the overhead hoist transport system and the storage ports. It receives carriers from the OHT via the upper transfer port and delivers them to storage ports along the shuttle rail, enabling flexible space utilization while maintaining reliance on the stable OHT system.
2Reliability
If existing overhead hoist transport infrastructure is relied upon, then transport reliability is maintained, but costs increase and transfer time is extended
Solution Approach 1:
The system performs preliminary action by pre-positioning carriers at storage ports along the shuttle rail before they are needed at process chambers. The internal carrier shuttle can quickly retrieve and deliver carriers from pre-positioned storage ports, reducing transfer time while the OHT system continues to reliably supply carriers to the storage system.
Solution Approach 2:
The internal carrier shuttle serves as an intermediary that handles time-critical carrier transfers between storage ports and process chambers, while the OHT system handles the less time-sensitive bulk carrier supply. This division reduces overall transfer time while maintaining transport reliability.
3Device complexity
If overhead hoist transport is used for all carrier handling, then system simplicity is maintained, but device complexity increases due to dependency on existing infrastructure
Solution Approach 1:
The system segments carrier handling into two independent subsystems: the overhead hoist transport system for macro-level carrier supply, and the ground-level storage system with shuttle rail and internal carrier shuttle for micro-level storage and retrieval operations. This segmentation enables storage flexibility without requiring the OHT system to handle all operations.
Solution Approach 2:
The storage system with shuttle rail and multiple storage ports provides multi-functional capability for carrier storage, retrieval, and transfer operations. It can serve multiple process chambers and accommodate various carrier types, enhancing versatility while keeping the OHT system's role focused and simple.
Data Source
AI summary
Disclosed are semiconductor carrier storage systems, semiconductor fabrication systems including the same, and/or semiconductor fabrication methods using the same. The semiconductor carrier storage system comprises storage ports each of which accommodates a semiconductor carrier, a shuttle rail that extends in a horizontal direction on a side of the storage ports, an internal carrier shuttle that moves along the shuttle rail and transfers a semiconductor carrier to each of the storage ports, and an upper transport that receives the semiconductor carrier from an overhead hoist transport (OHT). The internal carrier shuttle includes a shuttle body coupled to the shuttle rail, a transfer wheel that connects the shuttle body to the shuttle rail, a gripper that holds the semiconductor carrier, and a hoist that vertically extends between the shuttle body and the gripper and drives the gripper to vertically move.