Semiconductor Carrier Storage Ports With Backup Robot Transfer
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Solution Overview
Problem
Existing semiconductor manufacturing processes face inefficiencies in transferring and storing semiconductor carriers, leading to reduced throughput and potential system downtime due to equipment breakdowns.
Innovation Solution
An article transfer and storage apparatus comprising a frame with shelf plates and storage ports, a transfer robot with a gripper and extendable arm, and a controller to manage the movement of semiconductor carriers, allowing for efficient horizontal and vertical transport and storage, with redundant systems to minimize downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If semiconductor carriers are transferred using conventional methods (AGV or OHT), then the manufacturing process can continue, but the throughput is reduced and system downtime occurs due to equipment breakdowns
Solution Approach 1:
The patent implements a redundant transfer robot system where a second transfer robot is prepared as a backup. When the primary transfer robot experiences a breakdown or maintenance requirement, the system can seamlessly switch to the standby robot, ensuring continuous operation without downtime. This beforehand cushioning approach eliminates single-point failures and maintains productivity.
Solution Approach 2:
The system dynamically changes operational parameters by switching between different transfer robots based on system conditions. The controller monitors the status of the primary robot and activates the standby robot when needed, effectively changing the operational configuration to maintain optimal throughput and reliability.
2Reliability
If a single transfer robot is used, then the device complexity is reduced, but the system experiences downtime during breakdowns
Solution Approach 1:
The standby transfer robot is designed with universal functionality to perform the same tasks as the primary robot. Both robots share the same operational capabilities and interface with the same control system, allowing seamless substitution. This multi-functionality approach ensures reliability without requiring complex specialized systems for each robot.
Solution Approach 2:
The system uses an identical copy of the transfer robot as a standby unit. The second robot is a duplicate of the first, ensuring identical performance characteristics and simplifying the control logic. This copying approach maintains reliability while keeping the system configuration manageable through standardization.
3Adaptability or versatility
If storage ports are fixed in position, then the device complexity is reduced, but the adaptability to handle different carrier positions is limited
Solution Approach 1:
The storage ports are designed to be movable rather than fixed, allowing them to dynamically adjust their positions to accommodate different carrier locations. The storage ports can move horizontally along the shelf plate to access carriers in various positions, providing adaptability while using a relatively simple rail-based movement mechanism.
Solution Approach 2:
The movable storage ports act as intermediaries between the fixed shelf structure and the transfer robot. They provide the flexibility needed to access different carrier positions while maintaining a simple overall system architecture, mediating between the static frame and the dynamic transfer operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances throughput and maintains continuous operation by enabling efficient transfer and storage of semiconductor carriers, even in the event of a transfer robot breakdown.
Implementation Method 1
a port driver comprising an electromagnet disposed at a first end of a corresponding storage port of the plurality of storage ports, a magnetic material disposed at a second end of each storage port of the plurality of storage ports opposite to the first end
Implementation Method 2
a damper coupled to one side of the magnetic material disposed at the second end of each storage port
Data Source
AI summary
An article transfer and storage apparatus includes a case installed in a semiconductor factory and including a frame, the frame including at least a first shelf plate extending in a first horizontal direction, and a plurality of storage ports arranged on the first shelf plate and configured to accommodate a semiconductor carrier, and a storage port transport configured to move the storage ports in the first horizontal direction, and a transfer robot including a transport base at a bottom of the transfer robot, the transfer robot configured to place the semiconductor carrier in the case or take out the semiconductor carrier from the case and move the semiconductor carrier.