Automatic Carrier Transfer Gate Blocking Unit
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Solution Overview
Problem
The semiconductor post-process lacks an efficient automated system for transferring substrate carriers without damaging the substrates or causing them to be unloaded unexpectedly, leading to reduced efficiency and increased process time due to manual handling.
Innovation Solution
An automatic carrier transfer system with a gripper and gate blocking unit that securely couples to the substrate carrier, using a moving plate and blocking member to prevent substrate separation during transfer, allowing for mechanical and automated movement along a guide rail.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual transfer of substrate carrier is used in post-process, then substrate separation can be prevented, but transfer efficiency is reduced and process time increases
Solution Approach 1:
The substrate carrier is designed with self-blocking gates that automatically prevent substrate separation during automated transfer. The gate structure includes blocking members that are positioned to automatically engage and prevent substrate ejection without requiring manual intervention, enabling the system to serve itself during the transfer process.
2Speed
If automated transfer system is implemented, then transfer speed is improved, but substrate separation risk increases
Solution Approach 1:
The gate blocking members are pre-positioned in a ready state before transfer begins. The blocking members are configured to automatically engage with the substrates or carrier structure at the moment of transfer initiation, preventing substrate separation proactively rather than reacting after separation occurs.
Solution Approach 2:
The gate blocking members act as intermediary elements between the substrate carrier and the transferring substrate. These blocking members physically intervene to prevent direct contact between the moving carrier and substrates that might cause separation, mediating the transfer process to ensure reliability.
3Ease of operation
If substrate carrier without sealing door is used in post-process, then ease of operation is improved, but substrate unloading control is reduced
Solution Approach 1:
The gate blocking members are designed to be dynamically adjustable between different positions. They can be moved to a blocking position to prevent substrate unloading during transfer, and to an open position to allow substrate loading or unloading when the carrier is stationary, providing dynamic control over substrate access.
Data Source
AI summary
A carrier transfer for automatically transferring a substrate carrier includes a gripper detachably coupled to the substrate carrier, the substrate carrier including a plurality of substrates and at least one open gate through which the plurality of substrates are loaded into or unloaded from the substrate carrier. The gripper includes a gate blocking unit secured to the gripper and configured to shift to a blocking position, the blocking position being a position of the gate blocking unit that partially blocks the gate to prevent the plurality of substrates from being separated from the substrate carrier during the automatic transferring of the substrate carrier.