Carrier Unit Vibration Isolation via Segmented Frame
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Solution Overview
Problem
The existing substrate transfer apparatuses face challenges in preventing malfunctioning during substrate conveyance and simplifying their structure, particularly due to the need for high rigidity in components which increases production costs and complicates vibration control.
Innovation Solution
A carrier unit with a detachable frame body that includes a robot and substrate container opener, where the frame body's rigidity compensates for the robot and opener base portions' deformation, allowing for reduced rigidity in these components while maintaining stable substrate transfer, and includes a partitioning body to prevent dust migration and enhance maintenance accessibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the rigidity of the robot base and opener base is increased to prevent deformation during substrate transfer, then the stability and precision of substrate conveyance is improved, but the production cost increases and the structure becomes more complex
Solution Approach 1:
The system is divided into two functional segments: the frame body (main structure) and the base portions (robot base and opener base). By segmenting the load-bearing function to the frame body, the base portions can be simplified without compromising overall structural integrity or substrate transfer precision.
Solution Approach 2:
The frame body acts as an intermediary structure that absorbs and compensates for deformations in the base portions. This mediator (frame body) takes on the rigidity function, allowing the base portions to be less rigid while maintaining substrate conveyance precision through the frame's structural compensation.
2Reliability
If the rigidity of the robot base and opener base is increased to prevent deformation, then the stability of substrate transfer is improved, but the production cost increases
Solution Approach 1:
The structural functions are segmented between the frame body (providing rigidity and stability) and the base portions (simplified for ease of manufacture). This segmentation allows the majority of the rigidity requirement to be met by the frame body, reducing manufacturing complexity and cost for the base portions while maintaining overall substrate transfer stability.
Solution Approach 2:
The frame body serves as a mediator that compensates for any deformation in the simplified base portions. This intermediary structure ensures that even with less rigid bases, the substrate transfer stability is maintained because the frame body absorbs and corrects the deformations.
Data Source
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AI summary
In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.