Cartridge Type Identification Using Laser Range Finder in Electron Microscopes

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Solution Overview

Problem

In charged particle beam systems, such as electron microscopes, cooled cartridges can become frosted in a vacuum state, making it difficult to precisely identify their type using sensors, leading to potential misclassification.

Innovation Solution

A system that includes a plurality of cartridges with distinct measurement surfaces, a cartridge magazine, a laser range finder, and a discriminator to accurately determine the type of cartridges based on measured distances, unaffected by frost buildup.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If cartridges are cooled in a vacuum state, then sample morphology is preserved, but frost builds up on the cartridge making identifier detection impossible

Engineering Contradiction:
Improvesample morphology preservationVSAvoidcartridge type identification
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

A laser range finder is introduced as an intermediary measurement device that can determine cartridge type through distance measurement without requiring direct visual contact with the identifier. The laser range finder measures the distance to the cartridge surface, and this measurement is used by a discriminator to identify the cartridge type, thereby bypassing the frost obstruction problem

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The optical sensor-based identifier detection system is replaced with a laser range finder-based distance measurement system. Instead of using optical sensors to read identifiers or detect colors on the cartridge, the system uses laser time-of-flight or phase-shift measurement to determine cartridge type, which is not affected by frost buildup

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If sensors are used to detect cartridge identifiers, then cartridge type can be identified, but frost on the cartridge prevents precise reading

Engineering Contradiction:
Improvecartridge type detectionVSAvoididentifier reading accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The laser range finder serves as an intermediary that indirectly identifies cartridge type through distance measurement rather than directly reading the identifier. The discriminator processes the distance measurement to determine cartridge type, providing an indirect but reliable identification method that works through frost

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

Instead of directly reading the physical identifier on the cartridge, the system creates a measurement copy through laser distance measurement. The distance value serves as a proxy or copy of the cartridge type information, which can be accurately determined even when the original identifier is obscured by frost

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise identification of cartridge types without frost interference, ensuring accurate operation and sample handling in electron microscopes.

Implementation Method 1

a laser range finder for measuring a range to a selected one of the cartridges accommodated in the magazine

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentEP3901983B1Charged particle beam system
Publication Date: 2022.11.23 JEOL LTD
  • EP3901983B1 patent drawingFigure 1~2
  • EP3901983B1 patent drawingFigure 3~5
  • EP3901983B1 patent drawingFigure 6~7

AI summary

There is provided a charged particle beam system capable of determining the type of each cartridge precisely. An electron microscope (100) that embodies the charged particle beam system includes a discriminator (124) for determining the type of each cartridge based on the range or distance measured by a laser range finder (92). Plural cartridges (2) are received in a magazine (4). The laser range finder (92) measures the range to a selected one of the plural cartridges (2) which is placed in a measurement position. A first cartridge (2a) of a first type included in the plural cartridges (2) has a first measurement surface (208) at a first distance to the laser range finder (92) when placed in the measurement position. A second cartridge (2b) of a second type has a second measurement surface (218) at a second range to the laser range finder (92) when placed in the measurement position.