Cartridge Module for Precise Multi-Wafer Burn-In Testing
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Solution Overview
Problem
Conventional wafer testing processes are limited to single wafer inspection, lacking efficiency in testing multiple wafers simultaneously.
Innovation Solution
A multi wafer burn-in test device is developed, incorporating a cartridge module that modularizes a probe card and wafer, allowing for detachable assembly and precise positioning, along with a transfer unit to facilitate simultaneous inspection of multiple wafers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional single wafer testing process is used, then the testing process is simple and reliable, but the testing efficiency is low and time-consuming
Solution Approach 1:
The system segments the wafer testing process by dividing the wafer into multiple individual test units, each containing a wafer and its corresponding probe card. This segmentation allows multiple wafers to be tested simultaneously in parallel, thereby improving productivity from testing one wafer at a time to testing multiple wafers concurrently, directly addressing the low testing efficiency problem
Solution Approach 2:
The patent implements nesting by placing multiple probe cards within a single probe card holder, and multiple wafer holders within a single wafer holder. This nested structure enables compact arrangement of multiple test units, allowing the system to maintain manageable complexity while achieving parallel testing of multiple wafers, thus resolving the contradiction between productivity improvement and device complexity
2Productivity
If multiple wafers are tested simultaneously, then the testing efficiency is improved, but the positioning precision between probe cards and wafers becomes difficult to maintain
Solution Approach 1:
The probe card holder and wafer holder are designed with self-aligning features that automatically maintain precise positioning between multiple probe cards and wafers during the testing process. The holders themselves perform the positioning function through their structural design, eliminating the need for external positioning mechanisms and ensuring consistent precision across all test units, thus resolving the positioning precision problem while enabling simultaneous multi-wafer testing
Solution Approach 2:
The probe card holder and wafer holder are designed as universal components that can accommodate multiple probe cards and wafers while maintaining precise positioning for all units. These holders serve multiple functions: they hold multiple test units, provide precise positioning, and ensure proper alignment, thereby enabling simultaneous testing of multiple wafers without compromising positioning precision
3Ease of operation
If the probe card and wafer are modularized into a cartridge module, then the positioning is maintained and transfer is facilitated, but the device structure becomes more complex
Solution Approach 1:
The patent merges the probe card holder and wafer holder into a single integrated cartridge module, combining multiple test units into one transferable unit. This merging facilitates easy transfer between different testing locations while maintaining the modular benefits of individual probe card and wafer positioning, thus improving ease of operation. The integration is achieved through a unified holder structure that accommodates multiple components without creating excessive structural complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device enables efficient testing of multiple wafers by maintaining precise self-positioning of the probe card and wafer during transfer and inspection, enhancing test efficiency.
Implementation Method 1
a weight ring provided with a magnet chuck that is inserted into the guide hole and is fixed to the magnet holder by magnetic force
Data Source
AI summary
Proposed is a cartridge module that modularizes a probe card and a wafer to maintain positions thereof, and a multi wafer burn-in test device capable of inspecting multiple wafers in one test using the same. The device includes at least two chambers (120), each of which has a test head (121) that electrically connects a probe card and a tester (110) to test a loaded wafer, a cartridge module (200) including a first body (210) provided with the probe card (211), and a second body (220) provided with a wafer chuck (221) on which a wafer (10) is seated, the first body (210) and the second body (220) being detachably assembled with each other, a wafer loading unit (130) for loading the wafer (10) into the second body (220), and a transfer unit (150) configured to transfer and deliver the cartridge module (200).