Temperature control system
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Solution Overview
Problem
Current temperature control systems for semiconductor manufacturing, which use ternary refrigeration apparatuses, face challenges in achieving precise and rapid temperature control down to extremely low temperatures due to the need for high-performance compressors, leading to increased size, cost, and complexity, and lack quickness in switching between large temperature differences.
Innovation Solution
A temperature control system comprising multiple refrigerator units with cascade condensers and evaporators, allowing for selective fluid flow and temperature control using solenoid switching valves, enabling efficient cooling and quick temperature switching within a wide range including extremely low temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a high-performance compressor with special structure is used in the low-temperature-side refrigerator to ensure durability against extremely low temperature refrigerant, then the reliability is improved, but the device complexity and manufacturing cost increase
Solution Approach 1:
The patent introduces a medium-temperature-side refrigerator as an intermediary between the high-temperature-side and low-temperature-side refrigerators. The medium-temperature-side refrigerator's evaporator serves as a heat exchanger that cools the low-temperature-side refrigerant, allowing the low-temperature-side compressor to operate with a simpler structure while still achieving the required low temperatures through the cascaded cooling system.
2Reliability
If a high-performance compressor with special structure is used in the low-temperature-side refrigerator to ensure durability against extremely low temperature refrigerant, then the reliability is improved, but the manufacturing cost increases
Solution Approach 1:
The medium-temperature-side refrigerator acts as a mediator that protects the low-temperature-side compressor from direct exposure to extremely low temperature conditions. By using the medium-temperature evaporator as a heat exchanger, the system achieves reliable low-temperature operation without requiring expensive special-structure compressors, thereby reducing manufacturing costs.
3Productivity
If refrigeration capacity of the low-temperature-side evaporator is adjusted or heater is used to achieve quick temperature switching between extremely low temperature and higher temperature, then the productivity is improved, but the device complexity increases
Solution Approach 1:
The patent implements dynamic temperature control by enabling the low-temperature-side evaporator to selectively heat or cool the process fluid based on operational requirements. The system can quickly switch between heating mode (when low-temperature-side refrigerant flows directly to the evaporator) and cooling mode (when the evaporator functions as a heat exchanger with the medium-temperature-side refrigerant), achieving rapid temperature transitions without complex external control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system stabilizes cooling to extremely low temperatures, simplifies the compressor design, reduces manufacturing costs, and enables rapid switching of large temperature differences, improving temperature control precision and efficiency.
Implementation Method 1
a high-medium side cascade condenser, which heat-exchanges the high-temperature-side refrigerant and the medium-temperature-side refrigerant
Implementation Method 2
A medium-low side cascade condenser, which heat-exchanges the medium-temperature-side refrigerant with the low-temperature-side refrigerant
Implementation Method 3
a temperature control system, which cools a fluid such as a brine by the evaporator of the low-temperature-side refrigerator
Data Source
AI summary
A temperature control system includes: first and second refrigerator units; a first fluid flow apparatus that allows a first fluid to flow therethrough and that is cooled by the first refrigerator unit; a second fluid flow apparatus that allows a second fluid to flow therethrough and that is cooled by the second refrigerator unit; and a valve unit that is configured to allow the first fluid or the second fluid to selectively flow out therefrom. The first refrigerator unit has, in a medium-temperature-side refrigerator, a medium-temperature-side first expansion valve and a medium-temperature-side second expansion valve. A medium-temperature-side second evaporator corresponding to the medium-temperature-side second expansion valve and a low-temperature-side condenser of a low-temperature-side refrigerator constitute a cascade condenser. The first fluid is cooled by a medium-temperature-side first evaporator corresponding to the medium-temperature-side first expansion valve, and is then cooled by a low-temperature-side evaporator of the low-temperature-side refrigerator.