Wet Bench Cassette Carrier Structure for Low-Turbulence Flow
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Solution Overview
Problem
Wet bench processes cause unstable fluid flow in cassette carriers, leading to defects such as residues on sensitive semiconductor components like EUV pellicles due to turbulent flow induced by cassette holders.
Innovation Solution
Cassette holders with oblique surfaces, small contact areas, and through holes to prevent crisscross flow and reduce turbulence, ensuring smooth fluid flow and minimizing contact with semiconductor components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If traditional cassette holders with solid base structures are used, then structural support for semiconductor components is provided, but fluid turbulence is induced causing defect formation on component surfaces
Solution Approach 1:
The cassette holder base is designed with an array of through-holes creating a porous structure that allows fluid to pass through. This eliminates the solid surface that causes turbulence while maintaining structural integrity through the distributed hole pattern, directly resolving the contradiction between needing structural support and avoiding fluid turbulence-induced defects
Solution Approach 2:
The solid base structure is segmented into multiple discrete through-holes distributed across the holder surface. This segmentation allows the structure to maintain overall strength while creating multiple small flow paths instead of one large turbulent interface, reducing the harmful fluid dynamics effects
2Ease of manufacture
If solid base structures are used in cassette carriers, then manufacturing simplicity is maintained, but defect formation increases due to turbulent fluid flow
Solution Approach 1:
The through-hole porous structure can be manufactured using standard drilling or laser perforation techniques on existing holder materials, maintaining ease of manufacture. The resulting structure eliminates turbulence-induced defects, thereby improving component surface quality without requiring fundamentally new manufacturing processes
Solution Approach 2:
The design changes the geometric parameters of the base structure by introducing through-holes with specific dimensions and patterns. This parameter modification maintains manufacturability with conventional processes while dramatically improving component surface quality by eliminating the turbulence that causes defects
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces defect formation on semiconductor components by preventing fluid turbulence, enhancing structural integrity, and maintaining the quality of EUV pellicle membranes during processing.
Implementation Method 1
holders having oblique surfaces to redirect fluid flow to prevent crisscross flow patterns
Implementation Method 2
holders having through holes to allow fluid to pass through the holders to reduce turbulence and prevent dead zones
Data Source
AI summary
One aspect of the present disclosure pertains to a cassette carrier. The cassette carrier includes a frame defining an interior space having a top opening and a bottom opening, the frame having a first sidewall, a second sidewall, a first connecting wall, and a second connecting wall, where the first and second connecting walls extend between the first sidewall and the second sidewall. The cassette carrier includes a holder disposed across the bottom opening and laterally between the first and the second sidewall, where a through hole is formed in the holder, and an axis through the through hole passes through the top and the bottom openings.