Cassette Pod Manipulating Apparatus for Semiconductor Alignment
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Solution Overview
Problem
Existing methods for transporting and processing cassette pods in semiconductor manufacturing are not entirely satisfactory, particularly in terms of process control and efficiency, leading to potential misalignment and contamination issues during substrate handling.
Innovation Solution
A system comprising a processing machine, a transportation apparatus, and a manipulating apparatus that includes an intermediate module and a conveyor module to adjust the position and orientation of cassette pods, allowing precise alignment with load ports and automated door handling to prevent misalignment and contamination, thereby enhancing the efficiency of substrate transfer between processing machines and transportation systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If automated handling and transport equipment is used to transport cassette pods, then productivity is improved, but manufacturing precision deteriorates due to potential misalignment
Solution Approach 1:
An intermediate module is introduced between the transportation apparatus and the processing machine. This intermediate module includes a stage that can be positioned at different locations and a manipulating apparatus that adjusts the position and orientation of the cassette pod. The intermediate module acts as a mediator that receives the cassette pod from the automated transportation system and precisely positions it for the processing machine, thereby maintaining both high productivity from automation and high manufacturing precision through manual or controlled adjustment.
2Manufacturing precision
If manual door removal from cassette pod is performed, then manufacturing precision is maintained, but productivity deteriorates due to time-consuming operations
Solution Approach 1:
The door handling module is designed to automatically remove and replace the door of the cassette pod without requiring manual intervention. The module includes a door gripper that grasps the door, a door motor that drives the door movement, and a door sensor that detects door position. This automated self-service mechanism maintains contamination control (manufacturing precision) while significantly improving process speed (productivity) by eliminating time-consuming manual door removal operations.
3Ease of operation
If automated control system is used for handling equipment, then ease of operation is improved, but device complexity increases due to additional control mechanisms
Solution Approach 1:
The intermediate module serves multiple functions: it acts as a buffer between transportation and processing, provides position and orientation adjustment, supports door handling, and enables cassette pod retrieval. By consolidating these multiple functions into a single integrated module, the system achieves high ease of operation through automated control while managing device complexity through functional integration rather than separate independent systems.
Data Source
AI summary
A system for sending a cassette pod is provided. The system includes a processing machine having a load port for receiving the cassette pod. The system further includes a manipulating apparatus positioned above the processing machine. The manipulating apparatus includes an intermediate module having a stage and a driving mechanism connected to the stage to change the position of the stage. The manipulating apparatus further includes a conveyor module having a gripper assembly for grasping the cassette pod.