Cassette Position Teaching for Precise Consumable Transfer
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Solution Overview
Problem
Existing substrate processing systems face challenges in stabilizing the loading and unloading of consumable members into and from a storage module, leading to potential misalignment and interference issues.
Innovation Solution
A teaching method is introduced that recognizes the setting of a cassette in the storage module and uses sensors on a transfer device to detect and calculate the three-dimensional coordinates of the cassette, ensuring accurate alignment and transfer positions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If a transfer robot is used to load and unload consumable members between storage module and processing module, then automation is improved, but positioning precision deteriorates due to misalignment and machine differences
Solution Approach 1:
The system performs preliminary teaching operations to detect and calculate the three-dimensional coordinates of the cassette before actual transfer operations. This preliminary positioning data is stored and used to guide the transfer robot, eliminating the need for real-time alignment adjustments and ensuring consistent positioning precision across multiple transfer cycles.
Solution Approach 2:
The system uses sensors to detect the actual position of the cassette and provides feedback to the control unit. The control unit calculates the three-dimensional coordinates based on this feedback and adjusts the transfer robot's positioning accordingly, creating a closed-loop control system that maintains high positioning precision despite machine differences.
2Device complexity
If fixed teaching positions are used for the storage module, then device complexity is reduced, but adaptability deteriorates when cassettes are loaded at different positions
Solution Approach 1:
The system transitions from fixed teaching positions to dynamic three-dimensional coordinate detection. Sensors mounted on the transfer robot detect the cassette position dynamically, and the control unit calculates precise three-dimensional coordinates based on actual sensor readings. This dynamic approach allows the system to adapt to any cassette loading position while maintaining simplicity through automated detection and calculation.
3Manufacturing precision
If manual alignment methods are used for cassette positioning, then manufacturing precision can be achieved, but productivity decreases due to time-consuming alignment procedures
Solution Approach 1:
The system replaces manual mechanical alignment methods with an automated optical sensing and computational system. Sensors detect cassette positions, and the control unit calculates three-dimensional coordinates through automated computations. This substitution eliminates time-consuming manual alignment procedures while maintaining high positioning precision, thereby significantly improving productivity.
Data Source
AI summary
Provided is a teaching method for teaching a transfer position of a consumable member in a cassette included in a substrate processing system, the substrate processing system having a transfer device configured to transfer the consumable member, and a storage module where the cassette accommodating a plurality of the consumable members is set; the teaching method comprising the steps of: (A) recognizing setting of the cassette in the storage module; and (B) after the step (A), detecting the cassette by a sensor of the transfer device and calculating three-dimensional coordinates of the cassette based on detection information of the sensor.