Catalytic EUV Gas Recirculation for Power Stability
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Solution Overview
Problem
In extreme ultraviolet (EUV) light systems, the dissociation of gas mixture molecules during the production of amplified light beams leads to reduced power output, especially as the duty cycle increases, due to the conversion of CO2 molecules into carbon monoxide and oxygen, which are not reconverted back into original molecules contributing to optical amplification.
Innovation Solution
A catalytic conversion system is integrated into the EUV light system, utilizing a catalytic converter with a substrate coated with nanoparticles of metal, such as gold, to oxidize dissociated molecules back into their original form, maintaining the gas mixture's optical amplification capability and re-introducing it into the optical amplifier system, thereby maintaining power output levels without increasing energy input or adding additional oxidized molecules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the duty cycle of the optical amplifier system is increased to maintain continuous operation, then productivity is improved, but power output decreases due to accumulation of dissociated molecules (CO and O2) that do not contribute to optical amplification
Solution Approach 1:
The system implements a feedback mechanism where dissociated molecules (CO and O2) produced during amplification are continuously converted back into CO2 through catalytic oxidation. The converter receives the gas mixture from the amplifier, catalytically converts CO to CO2, and returns the regenerated gas mixture to the amplifier, creating a closed-loop system that maintains gas composition stability during continuous operation.
Solution Approach 2:
A catalytic converter acts as an intermediary component between the optical amplifier and the gas supply system. This converter mediates the chemical transformation of dissociated molecules back into amplification-active CO2 molecules, enabling the amplifier to maintain high power output during continuous operation without direct modification of the amplifier itself.
2Power
If additional energy is supplied to pump more CO2 molecules to maintain power output at high duty cycles, then power output is maintained, but use of energy increases
Solution Approach 1:
Instead of discarding the dissociated CO and O2 molecules as waste products, the system recovers them by catalytically converting them back into CO2. This recovery process eliminates the need to continuously supply fresh CO2 gas and reduces the energy required for pumping and maintaining gas pressure, while maintaining power output during continuous operation.
3Reliability
If the gas mixture is continuously circulated through the catalytic converter, then optical amplification capability is maintained, but device complexity increases
Solution Approach 1:
The catalytic converter is designed to be fluidly connected in series with the optical amplifier, creating an integrated gas circulation system. The converter merges the functions of gas processing and amplification support into a compact configuration where the converter receives gas from the amplifier and returns regenerated gas to the amplifier, minimizing additional system complexity while maintaining reliable optical amplification.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The catalytic conversion system effectively maintains the power output of the EUV light system at increased duty cycles by converting dissociated molecules back into their original form, ensuring consistent optical amplification and reducing the need for additional energy or gas mixture components.
Implementation Method 1
a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including nanoparticles of metal
Implementation Method 2
to oxidize dissociated molecules back into their original form
Data Source
AI summary
An extreme ultraviolet light system includes an optical amplifier system and a catalytic conversion system. Each optical amplifier of the optical amplifier system includes a gain medium in the form of a gas mixture that produces an amplified light beam. The optical amplifier system includes a fluid input and a fluid output through which the gas mixture flows. The catalytic conversion system is fluidly connected to the fluid output of the optical amplifier system and to the fluid input of the optical amplifier system. The catalytic conversion system includes a catalytic converter that includes a housing; a substrate within the housing including openings through which the gas mixture can flow; and a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including particles of metal. The particles of metal can be nanoparticles of precious metal.