Catalytic Layer Structure to Block Adhesion-Layer Diffusion
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Solution Overview
Problem
The catalytic activity of existing catalytic arrangements in laser systems, particularly those used in EUV lithographic systems, decreases over time due to material diffusion, necessitating frequent catalyst replacement.
Innovation Solution
A catalytic arrangement with a metal base layer, an adhesion layer made of a material that is substantially free of diffusion at temperatures below 300 degrees Celsius, or a diffusion barrier layer is introduced to prevent material diffusion through the catalyst layer, maintaining catalytic activity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a catalytic arrangement with a metal base layer and adhesion layer is used in a laser system, then the initial catalytic activity is achieved, but the catalytic activity decreases over time due to material diffusion
Solution Approach 1:
A diffusion barrier layer is introduced as an intermediary between the adhesion layer and the catalyst layer. This barrier layer prevents material diffusion from the adhesion layer into the catalyst layer, thereby maintaining catalytic activity over time without affecting the initial adhesion properties.
Solution Approach 2:
The catalytic arrangement uses a composite structure consisting of multiple layers with different functions: a metal base layer for structural support, an adhesion layer for bonding, and a diffusion barrier layer to prevent material degradation. This composite structure resolves the contradiction by combining materials with complementary properties.
2Strength
If the adhesion layer material diffuses through the catalyst layer, then adhesion is maintained, but the catalyst performance degrades
Solution Approach 1:
The original two-layer structure (adhesion layer + catalyst layer) is segmented into three separate functional layers by inserting a diffusion barrier layer between the adhesion layer and catalyst layer. This segmentation allows each layer to perform its specific function without interfering with the others, preventing adhesion material from degrading the catalyst.
3Device complexity
If no diffusion barrier is provided, then the structure remains simple, but material diffusion occurs at temperatures below 300 degrees Celsius
Solution Approach 1:
The solution changes the material composition parameter by selecting specific materials for the diffusion barrier layer that exhibit low diffusion coefficients at temperatures below 300 degrees Celsius. This material selection resolves the contradiction by providing stable composition without requiring complex structural modifications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution extends the long-term performance of the catalytic arrangement by preventing material diffusion, thereby maintaining consistent catalytic activity and reducing the need for frequent catalyst replacement.
Implementation Method 1
the adhesion layer is made of a material that is substantially free of diffusion through the catalyst layer at temperatures below 300 degrees Celsius, or wherein a diffusion barrier layer is provided between the adhesion layer and the catalyst layer, wherein the diffusion barrier layer reduces or prevents diffusion of material of the adhesion layer through the catalyst layer
Implementation Method 2
The catalyst is configured to convert CO and O 2 to CO 2
Data Source
Figure 1
Figure 2
Figure 3A~3B
AI summary
The present invention provides a catalytic arrangement for use in a laser system, wherein the catalytic arrangement comprises: a metal body or metal base layer, an adhesion layer coated on the metal body or base layer, and a catalyst layer arranged on the adhesion layer, wherein the adhesion layer is made of a material that is substantially free of diffusion through the catalyst layer at temperatures below 300 degrees Celsius, or wherein a diffusion barrier layer is provided between the adhesion layer and the catalyst layer, wherein the diffusion barrier layer reduces or prevents diffusion of material of the adhesion layer through the catalyst layer at temperatures below 300 degrees Celsius.