Indirectly Heated Cathode Clamp System for Ion Implanter Alignment
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Solution Overview
Problem
Conventional ion implanting systems face challenges in accurately setting up and spacing an indirectly heated cathode and filament due to reliance on subjective methods and partial disassembly, leading to alignment errors and lack of repeatability.
Innovation Solution
A clamp system with separable clamp members and a positioning tool that allows for in-situ alignment of the cathode and filament, featuring a surface to engage the mount portion and an opening to receive the positioning tool for precise positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional setup fixtures and subjective gauges are used to position the cathode and filament, then the alignment process can be completed, but alignment precision and repeatability deteriorate due to human error and lack of objective measurement
Solution Approach 1:
The patent replaces subjective mechanical gauges and fixtures with an optical alignment system using lasers. The laser provides an objective reference beam that enables precise and repeatable alignment of the cathode and filament without relying on human judgment or complex mechanical fixtures.
Solution Approach 2:
The alignment method using laser beams serves as a universal reference system that can be applied to position multiple components (cathode, filament, clamps) relative to a common optical axis, eliminating the need for separate fixtures for each component.
2Ease of operation
If setup fixtures are used to hold components during assembly, then positioning can be achieved, but device complexity increases due to additional fixtures and partial disassembly requirements
Solution Approach 1:
The patent extracts the alignment function from complex mechanical fixtures and implements it through a simple optical laser system. This eliminates the need for elaborate setup fixtures and reduces the complexity of the assembly process while maintaining positioning accuracy.
Solution Approach 2:
The laser alignment system serves as a self-contained reference that provides alignment information directly at the workspace, eliminating the need for external fixtures to define positions. The system is self-sufficient and does not require additional support structures.
3Manufacturing precision
If subjective gauges are used for alignment, then the alignment process can be completed, but manufacturing precision deteriorates due to human error
Solution Approach 1:
The patent replaces subjective mechanical measurement gauges with an optical laser alignment system. The laser provides an objective, observable reference that eliminates human interpretation errors and enables precise spacing and alignment measurements.
Solution Approach 2:
The laser alignment system uses visible light (color) to provide a clear, observable reference beam. The visual nature of the laser beam allows for precise alignment observation and measurement without subjective interpretation.
Data Source
AI summary
A method and clamp system for use on an ion implanter system for aligning a cathode and filament relative to one another in-situ are disclosed. The invention includes a clamp system having a clamp including a first clamp member separably coupled to a second clamp member, and an opening to a mount portion of one of the cathode and the filament in at least one of the clamp members. Each clamp member includes a surface to engage a mount portion of one of the cathode and the filament. The opening is adapted to receive a positioning tool to position the cathode and the filament relative to one another by moving the mount portion when the clamp is released. The mount portion may include a tool receiving member to facilitate accurate positioning.