Compact Cathode Drive Unit with Overlapping Fluid Conduits
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Solution Overview
Problem
There is a need for compact and efficient cathode drive units in sputtering installations that can reliably support rotatable targets under heavy mechanical loads and maintain vacuum integrity, while minimizing space requirements and costs.
Innovation Solution
A device with a main body featuring orthogonal first and second fluid conduits that overlap in projection, allowing for a compact design by extending radially outward from the rotational axis, providing coolant and receiving fluid from the rotatable target, and maintaining a closed coolant circuit to manage heat and support the target effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the cathode drive unit is designed with conventional fluid conduit arrangements, then the structural integrity and cooling function are maintained, but the space requirements increase and compactness is reduced
Solution Approach 1:
The patent applies dimensional optimization by arranging fluid conduits in three-dimensional space with overlapping projections onto the rotational axis plane. This allows the first and second fluid conduits to occupy different axial positions while maintaining compact radial footprint, effectively utilizing spatial dimensions to reduce overall volume without compromising structural integrity or cooling functionality
2Volume of moving object
If the cathode drive unit is made compact to reduce space requirements, then cost and space efficiency improve, but the ability to reliably bear heavy mechanical loads over long periods may be compromised
Solution Approach 1:
The patent merges multiple functions into the compact cathode drive unit structure. The fluid conduits are integrated directly into the drive unit housing, and the overlapping projection arrangement allows both cooling fluid pathways to be contained within a reduced volume. This integration eliminates the need for separate external cooling systems, achieving compactness while maintaining full mechanical load bearing capacity through the unified structural design
3Temperature
If conventional fluid conduit arrangements are used, then cooling function is provided, but the device complexity and space occupation increase
Solution Approach 1:
The patent utilizes axial positioning to differentiate the first and second fluid conduits. By arranging conduits at different axial coordinates with overlapping radial projections, the design provides separate cooling pathways (maintaining cooling function) while reducing the radial space required. This dimensional arrangement simplifies the overall conduit configuration compared to traditional side-by-side radial arrangements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a compact, space-efficient, and cost-effective cathode drive unit that supports rotatable targets during sputtering, enhancing deposition rates and prolonging service life by effectively managing mechanical loads and maintaining vacuum conditions.
Implementation Method 1
a first fluid conduit in the main body for receiving a fluid from the rotatable target and a second fluid conduit in the main body for providing the fluid to the rotatable target, wherein the projection of the second fluid conduit onto a projection plane that extends in direction of the rotational axis lies within the projection of the first fluid conduit onto the projection plane
Data Source
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AI summary
A device (100) for supporting a rotatable target (10) and deposition apparatus (200) having such a device (100) are provided. The device includes a main body (110), a first fluid conduit (131) in the main body (110) for receiving a fluid from the rotatable target (10), and a second fluid conduit (132) in the main body (110) for providing the fluid to the rotatable target (10). The projections of the first fluid conduit (131) and the second fluid conduit (132) onto a projection plane that extends in the direction of the rotational axis (50) of the rotatable target (10) overlap each other.