Cathodoluminescence Optics for Simultaneous Wavelength and Angle Resolution
Solution Overview
Problem
Existing cathodoluminescence (CL) instruments face limitations in efficiently resolving wavelength and angle information due to the introduction of aberrations and the need for complex, time-consuming methods to analyze CL light, which affects the accuracy and efficiency of sample characterization.
Innovation Solution
The use of a mirror translation apparatus and image-conduit systems to translate light patterns without introducing aberrations, combined with optical spectrograph and hyperspectral imaging filters, allows for efficient wavelength and angle-resolved CL analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If complex scanning methods are used to resolve wavelength and angle information, then measurement precision is improved, but analysis time increases and productivity decreases
Solution Approach 1:
The patent segments the angular information by using separate slits for different angular ranges (e.g., first slit for -30° to +30°, second slit for other angles). This allows simultaneous capture of different angular regions without sequential scanning, improving both precision and productivity by dividing the measurement task into parallel segments.
Solution Approach 2:
The patent transitions from one-dimensional sequential scanning to two-dimensional simultaneous detection by using multiple slits positioned at different angular orientations. This dimensional change allows multiple angular and wavelength measurements to occur concurrently, resolving the contradiction between precision and productivity.
2Measurement precision
If sequential scanning methods are used to analyze CL light, then measurement precision is maintained, but loss of time increases
Solution Approach 1:
The patent implements continuous simultaneous measurement by using multiple slits that capture different angular and spectral information at the same time. This eliminates the idle time between sequential scans while maintaining continuous useful action, reducing time loss without compromising precision.
Solution Approach 2:
The patent performs preliminary spatial separation of light paths using multiple slits positioned to capture specific angular ranges before detection. This preliminary action organizes the light paths in advance, allowing simultaneous detection without the need for time-consuming sequential scanning.
3Measurement precision
If multiple optical components are used for wavelength and angle resolution, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent makes the slits multi-functional by designing them to simultaneously perform angular selection and wavelength discrimination. Each slit serves multiple purposes: defining angular acceptance, directing light to specific detectors, and enabling spectral analysis. This universality reduces device complexity while maintaining measurement precision.
4Measurement precision
If sequential angular and spectral analysis is performed, then measurement precision is maintained, but productivity decreases
Solution Approach 1:
The patent segments the angular range into multiple zones captured by different slits simultaneously. The first slit captures a central angular range while the second slit captures peripheral angles, allowing parallel measurement of different angular and spectral information, thereby improving productivity without sacrificing precision.
Solution Approach 2:
The patent merges angular selection and spectral analysis functions into a single simultaneous measurement process. By combining multiple slits that perform both angular filtering and spectral detection concurrently, the system achieves both high precision and high productivity in sample characterization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables faster, more dose-efficient, and accurate analysis of CL light, providing enhanced characterization of samples by reducing aberrations and simplifying the scanning process.
Implementation Method 1
When a high-energy charged particle such as an electron or ion beam strikes a sample, photons can be emitted depending on the sample material. This phenomenon is emitted known as cathodoluminescence (CL).
Implementation Method 2
A common way to collect photons emitted via CL is via a collection-mirror, which may be a paraboloid mirror, located on axis with the electron beam (e-beam) and either above (more typically) or below the sample or both above and below the sample.
Data Source
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AI summary
Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.