Cathodoluminescence Optics for Aberration-Free Angular Resolution
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Solution Overview
Problem
Current cathodoluminescence (CL) measurement techniques face limitations in efficiently resolving the angular and spectral information of emitted photons due to the introduction of aberrations and the need for complex and costly filter systems, which hinder the accurate characterization of sample properties.
Innovation Solution
The use of a mirror translation apparatus and image conduits, such as fiber-optic conduits, to aberration-free translate the CL light, allowing for efficient angle-resolving without introducing chromatic or off-axis aberrations, and the implementation of hyperspectral imaging filters to simplify the system and improve spectral resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional filter systems are used to resolve angular and spectral information, then spectral resolution can be achieved, but the system becomes complex and costly with introduced aberrations
Solution Approach 1:
The patent extracts and removes the complex filter system from the optical path by using a mirror translation apparatus that directly translates angular information to spatial positions on the detector. This eliminates the need for dichroic mirrors, beam splitters, and other filtering components while preserving spectral resolution through geometric optics alone.
Solution Approach 2:
The patent replaces the mechanical filter system with a mirror translation mechanism that uses precise mechanical positioning to achieve spectral and angular resolution. The mirror translates in a direction perpendicular to the optical axis, converting angular information into spatial information on the detector without introducing optical aberrations.
2Measurement precision
If complex filter systems are implemented to achieve angular and spectral resolution, then measurement accuracy improves, but the cost of the system increases
Solution Approach 1:
The patent removes expensive filter components (dichroic mirrors, beam splitters, filters) from the system and replaces them with a simpler mirror translation apparatus. This extraction of unnecessary components directly reduces system cost while maintaining measurement precision through geometric optics.
3Device complexity
If traditional CL measurement techniques are used, then the system structure is simple, but the ability to resolve angular and spectral information efficiently is limited
Solution Approach 1:
The patent introduces a dynamic mirror translation mechanism that moves the mirror in a direction perpendicular to the optical axis. This dynamic positioning allows different emission angles to be translated to different spatial positions on the detector, enabling efficient angular and spectral resolution while maintaining a relatively simple overall system structure.
4Measurement precision
If filter systems are used to resolve spectral information, then spectral analysis is possible, but chromatic and off-axis aberrations are introduced
Solution Approach 1:
The patent extracts the spectral information resolution function from the filter system and implements it through geometric optics with a translating mirror. This approach eliminates chromatic and off-axis aberrations because the mirror translation occurs perpendicular to the optical axis, maintaining optimal optical paths for all wavelengths without introducing wavelength-dependent errors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables faster and more dose-efficient data collection with improved angular and spectral resolution, reducing the need for complex filter systems and minimizing errors, thus enhancing the characterization of sample properties.
Implementation Method 1
The use of a mirror translation apparatus and image conduits, such as fiber-optic conduits, to aberration-free translate the CL light
Implementation Method 2
The use of a mirror translation apparatus and image conduits, such as fiber-optic conduits, to aberration-free translate the CL light
Implementation Method 3
the implementation of hyperspectral imaging filters to simplify the system and improve spectral resolution
Data Source
AI summary
Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.