Cationic-Based Conductive Oxide Memory for Low Voltage Operation

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Solution Overview

Problem

Current non-volatile memory devices face challenges with high voltage requirements, non-volatility, soft error rates, and limited endurance, particularly in low voltage embedded applications, and existing RRAMs operate at voltages greater than 1V with high resistance values, limiting read performance.

Innovation Solution

The development of low voltage embedded memory using cationic-based conductive oxide elements, specifically a metal-conductive oxide-metal (MCOM) structure, which employs a junction-free arrangement and oxygen vacancy generation for programming, allowing for faster operations by leveraging higher ionic conductivity compared to anionic-based oxides.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional RRAM devices are used, then non-volatile memory functionality is achieved, but high voltage (>1V) is required for operation and forming

Engineering Contradiction:
Improvenon-volatile memory functionalityVSAvoidoperating voltage
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent changes the material parameter from conventional oxide to cationic-based conductive oxide (such as lithium cobalt oxide, lithium nickel oxide, lithium manganese oxide), which fundamentally alters the conduction mechanism and enables low-voltage operation while maintaining non-volatile memory functionality

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite structure consisting of cationic-based conductive oxide combined with specific electrode materials (such as aluminum, copper, or tungsten electrodes), creating a material system that achieves both low-voltage operation and non-volatile memory characteristics

Inventive Principle:
Principle #40Composite materials

2Reliability

If conventional RRAM devices are used, then resistance change memory is achieved, but high resistance values limit read performance

Engineering Contradiction:
Improvememory functionalityVSAvoidread performance
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent changes the electrical resistance parameter by using cationic-based conductive oxides with inherently lower resistance values compared to conventional RRAM materials, thereby improving read performance while maintaining memory functionality

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent substitutes the conventional resistance-based memory mechanism with a cationic ion migration mechanism in lithium-based oxides, which provides both memory functionality and improved electrical characteristics for reading

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If conventional oxide-based RRAM is used, then memory operation is achieved, but high voltage forming step is required

Engineering Contradiction:
Improvememory operationVSAvoidforming process
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent changes the material composition parameter to cationic-based conductive oxides that do not require high-voltage forming, as the cationic ion migration mechanism is inherently active at lower voltages compared to anionic oxygen vacancy mechanisms

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent extracts and eliminates the high-voltage forming step from the device fabrication process by using cationic-based conductive oxides that operate effectively without this additional processing step, thereby simplifying the overall device complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables low voltage operation, eliminates the need for high voltage forming steps, and achieves fast read performance with resistive memory devices, providing improved reliability and endurance.

Implementation Method 1

an applied electrical field, which drives such compositional change during write operation, is tuned to values approximately in the range of 1e6-1e7 V/cm

Methodology Applied
Scientific EffectCation migration: Ion Repulsion/Attraction

Implementation Method 2

Resistivity of the cationic-based conductive oxide layer is changed due to stoichiometry - induced Mott transition

Methodology Applied
Scientific EffectStoichiometry-induced Mott transition:

Implementation Method 3

faster programming operations may be achieved. Such increase in performance may be based, at least partly, on the observation that ionic conductivities are much higher for cationic conductive oxides versus anionic conductive oxides

Methodology Applied
Scientific EffectIonic conductivity: Conduction (electrical)

Data Source

PatentEP2926371B1Low voltage embedded memory having cationic-based conductive oxide element
Publication Date: 2018.11.07 INTEL CORP
  • EP2926371B1 patent drawingFigure 1~2
  • EP2926371B1 patent drawingFigure 3(A)~3(C)
  • EP2926371B1 patent drawingFigure 4

AI summary

Low voltage embedded memory having cationic-based conductive oxide elements is described. For example, a material layer stack for a memory element includes a first conductive electrode. A cationic-based conductive oxide layer is disposed on the first conductive electrode. The cationic-based conductive oxide layer has a plurality of cation vacancies therein. A second electrode is disposed on the cationic-based conductive oxide layer.