Cavity Fan-Out Package Layout for High-Density I/O Miniaturization

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Solution Overview

Problem

The semiconductor industry faces challenges in miniaturizing integrated circuits while maintaining high functionality and low cost, particularly in achieving smaller package sizes for applications requiring miniaturization, where traditional packaging technologies struggle to efficiently integrate and connect components with high density and performance.

Innovation Solution

The development of an Integrated Fan-Out (InFO) package using a heterogeneous substrate with cavities and metallization layers, which includes a redistribution structure on both sides of the integrated circuits, allowing for flexible dimensions and reduced package height, and the use of a cavity substrate with conductive plugs and traces for signal redistribution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If traditional packaging technologies are used, then manufacturing simplicity is maintained, but package size cannot be sufficiently reduced while maintaining high functionality

Engineering Contradiction:
Improvepackage sizeVSAvoidpackaging structure complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent implements fan-out wiring that extends connections from the chip surface to the package exterior, utilizing three-dimensional spatial arrangement to achieve higher I/O density without increasing planar footprint. The redistribution layers are stacked in multiple tiers, transforming two-dimensional routing into three-dimensional pathways that resolve the contradiction between compact size and connection complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs multiple redistribution layers nested within each other, with each layer containing conductive traces and vias that interconnect to form complex wiring patterns. These nested structures allow numerous I/O connections to be packed into a small volume by organizing conductors in hierarchical layers, effectively reducing package size while maintaining high functionality.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If the number of input/output pads is increased for high functionality, then functional density is improved, but package area increases

Engineering Contradiction:
Improvefunctional densityVSAvoidpackage area
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

The fan-out package architecture redistributes I/O pads from a planar arrangement to a three-dimensional configuration using multiple redistribution layers stacked vertically. This allows the package to accommodate a high number of I/O connections without proportionally increasing the package footprint, as connections are routed through vertical vias and horizontal traces in multiple tiers.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent divides the wiring structure into multiple segmented redistribution layers, each handling specific portions of the I/O routing. This segmentation allows complex high-density interconnections to be organized into manageable layers, enabling functional density to increase while the package area remains controlled through efficient spatial utilization.

Inventive Principle:
Principle #1Segmentation

3Volume of moving object

If integrated circuits are miniaturized, then package size is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvepackage volumeVSAvoidfeature size precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The patent forms the complete multi-layer redistribution structure and all conductive pathways before mounting the chip. The carrier substrate is prepared with pre-formed redistribution layers, vias, and trace patterns that precisely define connection locations. This preliminary structuring establishes accurate alignment references that guide subsequent chip placement and bonding, ensuring manufacturing precision is maintained even as package dimensions are reduced.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS12199084B2Fan-out package with cavity substrate
Publication Date: 2025.01.14 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12199084B2 patent drawing
  • US12199084B2 patent drawing
  • US12199084B2 patent drawing

AI summary

Structures and methods of forming fan-out packages are provided. The packages described herein may include a cavity substrate, one or more semiconductor devices located in a cavity of the cavity substrate, and one or more redistribution structures. Embodiments include a cavity preformed in a cavity substrate. Various devices, such as integrated circuit dies, packages, or the like, may be placed in the cavity. Redistribution structures may also be formed.