Cavity Semiconductor Package Layout for Thermal Reliability

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Solution Overview

Problem

Conventional semiconductor packages face issues of excess cost, decreased reliability, and large package sizes, leading to suboptimal performance.

Innovation Solution

A semiconductor device design featuring a substrate with a base and leads, where an encapsulant is interposed between the leads, and an electronic component is coupled to the cavity side, spaced apart from the encapsulant, allowing for improved thermal performance and reduced package size through selective etching and molding processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional semiconductor packages are used, then manufacturing is simpler, but package size is too large and cost is excessive

Engineering Contradiction:
Improvepackage sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The electronic component is nested within a cavity formed in the substrate, with the encapsulant material filling and protecting the component. This nesting approach reduces the overall package volume by integrating the component into the substrate structure rather than mounting it externally, directly addressing the contradiction between compact size and manufacturing feasibility.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The invention transitions from traditional planar package layouts to a three-dimensional structure by forming a cavity within the substrate and positioning the electronic component vertically within this cavity. This dimensional change enables smaller footprint and volume while maintaining manufacturing simplicity through standard semiconductor fabrication processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If conventional semiconductor packages are used, then manufacturing process is traditional, but reliability is decreased

Engineering Contradiction:
Improvepackage reliabilityVSAvoidmanufacturing ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The substrate and encapsulant are merged into an integrated structure where the encapsulant is formed as part of the substrate fabrication process. The cavity is formed within the substrate itself, and the encapsulant material is deposited to seal and protect the electronic component. This merging eliminates separate assembly steps, improving reliability through better integration while maintaining ease of manufacture through consolidated processing.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The cavity is formed in the substrate before the electronic component is installed, and the encapsulant is applied in advance to seal the component within the cavity. This preliminary structuring of the package architecture enables subsequent component placement and sealing to be performed more reliably, improving overall package reliability without significantly complicating the manufacturing process.

Inventive Principle:
Principle #10Preliminary action

3Temperature

If conventional semiconductor packages are used, then structure is traditional, but thermal performance is insufficient

Engineering Contradiction:
Improvethermal performanceVSAvoidstructural complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The substrate is designed with a cavity that provides direct thermal pathways from the electronic component to heat sinks or thermal management structures. The encapsulant material is selectively applied to protect the component while maintaining thermal conductivity in critical regions. This local optimization of structural quality enables superior thermal performance without requiring complete redesign of the entire package structure.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20240096766A1Semiconductor devices and methods of manufacturing semiconductor devices
Publication Date: 2024.03.21 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US20240096766A1 patent drawing
  • US20240096766A1 patent drawing
  • US20240096766A1 patent drawing

AI summary

In one example, a semiconductor device includes a substrate. The substrate includes a base including a top side and a cavity side opposite to the top side, leads extending from the cavity side, and an encapsulant interposed between the leads. An electronic component is located on the cavity side and spaced apart from the encapsulant. Other examples and related methods are also disclosed herein.