CBRAM Resistance Change Layer Composition for Low-Power Fast Switching

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Solution Overview

Problem

Current memory devices face challenges in reducing power consumption, increasing operating speed, and facilitating high mass production, particularly in the context of conductive bridging RAM (CBRAM) technology.

Innovation Solution

A memory device with a resistance change layer comprising an alkali metal and a transition metal, where the alkali metal content is between 40% and 88%, forming an ion bridge that switches between low and high resistance states based on voltage levels, and a manufacturing method involving alternating deposition processes to control the metal content, utilizing alkali metal and transition metal precursors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If conventional non-volatile memory is used, then data storage capability is achieved, but power consumption is excessively high

Engineering Contradiction:
Improvepower consumptionVSAvoiddata storage capability
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent changes the material parameters by using alkali metal ions (Li+, Na+, K+) with high mobility in the resistance change layer, and controls the composition ratio (40-88 at%) to optimize the balance between low power consumption and reliable data storage through resistance state switching

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs a composite resistance change layer containing both alkali metal and transition metal elements, combining the high ion mobility of alkali metals with the structural stability provided by transition metals to achieve both low power consumption and reliable storage

Inventive Principle:
Principle #40Composite materials

2Speed

If metal ions with low mobility are used in CBRAM, then device structure is simpler, but operating speed is reduced

Engineering Contradiction:
Improveoperating speedVSAvoiddevice structure
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent fundamentally changes the ion mobility parameter by selecting alkali metal ions (Li+, Na+, K+) which inherently possess high mobility due to their atomic structure, enabling fast switching speeds without complicating the device structure

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by concentrating the high-mobility alkali metal ions specifically in the resistance change layer region where ion transport is needed, while maintaining simple electrode structures, thus achieving high speed without overall device complexity

Inventive Principle:
Principle #3Local quality

3Reliability

If alkali metal content in resistance change layer is not controlled, then manufacturing process is simpler, but electrical characteristics are poor

Engineering Contradiction:
Improveelectrical characteristicsVSAvoidmanufacturing process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent establishes specific parameter ranges for alkali metal content (40-88 at%) to optimize electrical characteristics including resistance ratio and switching voltage, while using atomic layer deposition with controllable deposition rates to achieve this precision without excessive manufacturing complexity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs atomic layer deposition (ALD) which uses chemical vapor deposition mechanisms instead of traditional physical sputtering methods, enabling precise control of alkali metal content at the atomic layer level through controlled precursor delivery and reaction conditions

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables memory devices with low power consumption and high operating speed, while the atomic layer deposition method facilitates high mass production and improved electrical characteristics.

Implementation Method 1

ions of the alkali metal may form an ion bridge connecting the first electrode to the second electrode

Methodology Applied
Scientific EffectIon bridge formation: Ion Repulsion/Attraction

Implementation Method 2

the ion bridge is formed between the first electrode and the second electrode so that the resistance change layer may have a low resistance state

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

a first unit process for reacting a first precursor containing an alkali metal with a first reaction source, and a second unit process for reacting a second precursor containing a transition metal with a second reaction source to form a resistance change layer

Methodology Applied
Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Data Source

PatentUS12010929B2Memory device and manufacturing method therefor
Publication Date: 2024.06.11 IND UNIV COOP FOUND HANYANG UNIV ERICA CAMPUS
  • US12010929B2 patent drawing
  • US12010929B2 patent drawing
  • US12010929B2 patent drawing

AI summary

A memory device is provided. The memory device may comprise: a first electrode; a resistance change layer placed on the first electrode and containing an alkali metal and a transition metal; and a second electrode placed on the resistance change layer, wherein the content of the alkali metal in the resistance change layer ranges from 40 at % (exclusive) to 88 at % (exclusive).