CdZnTe Semiconductor Radiation Detector Segmentation

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Solution Overview

Problem

Current semiconductor radiation detectors face challenges in efficiently detecting and processing radiation signals, particularly in achieving precise energy measurement and noise rejection, which affects their accuracy and reliability in applications such as medical imaging and cargo scanning.

Innovation Solution

The method involves bonding cadmium zinc telluride (CdZnTe) semiconductor single crystal chunks to semiconductor wafers with conductive pillars and forming electrodes, coupled with an electronics system that includes voltage comparators and a controller to process radiation signals, allowing for precise detection and energy measurement of radiation particles.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If semiconductor single crystal chunks are bonded to semiconductor wafers to form radiation absorption layers, then radiation detection capability is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveradiation detection capabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The radiation absorption layer is segmented into multiple semiconductor single crystal chunks bonded to the semiconductor wafer. Each chunk can be independently processed and characterized, allowing for modular manufacturing where defective chunks can be replaced without discarding the entire detector. This segmentation improves reliability while managing manufacturing complexity through standardized chunk fabrication processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Conductive pillars are introduced as intermediary structures between the semiconductor single crystal chunks and the semiconductor wafer. These pillars facilitate electrical connection and mechanical bonding, enabling efficient charge carrier collection while simplifying the overall bonding process. The conductive pillars act as a mediator that resolves the complexity of direct chunk-to-wafer bonding by providing a standardized interface.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If multiple electrodes are formed on semiconductor chunks for charge carrier detection, then measurement precision is improved, but manufacturing complexity increases

Engineering Contradiction:
Improvecharge carrier detection precisionVSAvoidmanufacturing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Multiple electrodes are formed on each semiconductor single crystal chunk to detect different charge carrier signals. By combining multiple electrode functions on a single chunk, the system achieves high measurement precision for charge carrier detection while reducing the overall number of discrete components. This merging approach allows precise electrical characteristics measurement without proportionally increasing manufacturing complexity.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If conductive pillars are deposited on semiconductor chunks for bonding, then electrical conductivity is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improveelectrical conductivityVSAvoidpillar deposition precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The conductive pillars are designed with optimized geometric parameters including height, diameter, and spacing. By carefully selecting these parameters, the system achieves reliable electrical conductivity while maintaining compatibility with standard semiconductor fabrication capabilities. The pillar parameters are tuned to balance conductivity requirements against the precision capabilities of available deposition equipment.

Inventive Principle:
Principle #35Parameter changes

4Manufacturing precision

If semiconductor chunks are polished to uniform thickness, then manufacturing precision is improved, but processing time increases

Engineering Contradiction:
Improvechunk thickness uniformityVSAvoidpolishing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The semiconductor single crystal chunks are pre-polished to near-uniform thickness before bonding to the semiconductor wafer. This preliminary action removes the bulk of material variations, requiring only minor final adjustments after bonding. By performing the major polishing operation beforehand, the system achieves high thickness uniformity while minimizing the time required for final precision processing.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the detection efficiency and accuracy of radiation signals, enabling improved imaging and inspection capabilities by effectively distinguishing between radiation particles and noise, thereby improving the overall performance of radiation detectors.

Implementation Method 1

a semiconductor layer that absorbs the radiation and generate charge carriers (e.g., electrons and holes)

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS11380812B2Methods of making semiconductor radiation detector
Publication Date: 2022.07.05 SHENZHEN XPECTVISION TECH CO LTD
  • US11380812B2 patent drawing
  • US11380812B2 patent drawing
  • US11380812B2 patent drawing

AI summary

Disclosed herein is an apparatus and a method of making the apparatus. The method comprises obtaining a plurality of semiconductor single crystal chunks. Each of the plurality of semiconductor single crystal chunks may have a first surface and a second surface. The second surface may be opposite to the first surface. The method may further comprise bonding the plurality of semiconductor single crystal chunks by respective first surfaces to a first semiconductor wafer. The plurality of semiconductor single crystal chunks forming a radiation absorption layer. The method may further comprise forming a plurality of electrodes on respective second surfaces of each of the plurality of semiconductor single crystal chunks, depositing pillars on each of the plurality of semiconductor single crystal chunks and bonding the plurality of semiconductor single crystal chunks to a second semiconductor wafer by the pillars.