Ceiling Rack Storage Layout for Fab Capacity Without Floor Footprint
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Solution Overview
Problem
The shortage of storage capacity in fabrication facilities for semiconductor devices, particularly due to the footprint constraints of existing storage systems, reduces logistical efficiency and limits the installation of additional equipment.
Innovation Solution
A ceiling storage system utilizing overhead racks, support rails, driving rails, and transport vehicles to maximize storage capacity by leveraging idle ceiling space, with interface ports for seamless article transfer between different transport systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a stocker or portable interface buffer is added to increase storage capacity, then storage capacity is improved, but the footprint occupied increases, reducing space for installing other equipment
Solution Approach 1:
The patent transitions from floor-based storage (2D footprint) to ceiling-based storage (utilizing vertical 3D space). The overhead rack system is installed on the ceiling, allowing storage capacity expansion without occupying additional floor area, thus resolving the contradiction between storage capacity and footprint.
2Quantity of substance
If a sidetrack buffer is installed to increase storage capacity, then storage capacity is improved, but the installation space required increases, which is problematic for fabs already in operation with saturated installation space
Solution Approach 1:
The patent utilizes the ceiling space (vertical dimension) instead of floor space (horizontal dimension) for installation. The overhead rack and transport vehicle system can be installed above existing equipment without requiring additional floor space, making it adaptable to fabs with saturated installation space.
Solution Approach 2:
The overhead rack system serves multiple functions: it provides storage capacity, acts as an interface buffer, and integrates with existing OHT paths. The system can be configured at various locations along the OHT path and serves both storage and transfer functions, enhancing versatility.
3Quantity of substance
If sidetrack buffers are installed on both sides of the OHT path to increase storage capacity, then storage capacity is improved, but dead space occurs in branching and rotating areas, and installation is limited to specific locations
Solution Approach 1:
The patent employs a movable transport vehicle that travels along the overhead rack, replacing static sidetrack buffers. The vehicle can dynamically access any storage position along the OHT path, eliminating dead space in branching and rotating areas while providing flexible installation options.
Data Source
AI summary
Provided is a ceiling storage system for increasing storage capacity by utilizing a ceiling space inside a fab. The ceiling storage system includes a first overhead rack including a plurality of storage positions for storing a plurality of articles; first and second support rails above the first overhead rack and extending in one direction; a first driving rail above the first overhead rack and in parallel with the first and second support rails; a second driving rail coupled to the first and second support rails and the first driving rail and moving along the first and second support rails and the first driving rail; and a first transport vehicle including a carriage coupled to the second driving rail and moving along the second driving rail, and a hoist and a hand unit installed on the carriage and for loading and unloading the articles to and from the first overhead rack.