Ceiling-Mounted Wafer Storage and Handling Apparatus
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Solution Overview
Problem
Existing semiconductor wafer storage facilities are space-intensive, limited in capacity, and difficult to expand, as they are typically ground-based and interfere with robot pathways, restricting efficient storage and handling of a large quantity of wafers.
Innovation Solution
A ceiling-mounted storage and handling apparatus featuring internal and external rails, a cradle, and a transfer robot with a two-way sliding unit and elevation-driving unit, allowing for independent storage and handling of a large quantity of articles, with expandable configurations to accommodate increased wafer quantities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If ground-based storage facilities are used, then storage capacity is limited, but facility space consumption is large
Solution Approach 1:
The patent transitions from ground-based two-dimensional storage to ceiling-mounted three-dimensional storage by utilizing the vertical space above the semiconductor manufacturing facility. The storage system includes multiple levels of storage units arranged vertically, with transfer robots moving along ceiling-mounted rails to access articles at different heights and positions, effectively converting unused vertical space into functional storage capacity.
2Quantity of substance
If temporary storage facilities are installed around robot traveling paths, then storage capacity increases slightly, but robot interference occurs
Solution Approach 1:
The storage system is mounted on the ceiling, completely separating the storage function from the robot traveling paths on the ground level. Transfer robots move along ceiling-mounted rails independent of the manufacturing robots below, eliminating spatial interference and improving operational reliability while providing substantial storage capacity.
3Quantity of substance
If ground-based storage facilities are expanded, then storage capacity increases, but facility complexity increases
Solution Approach 1:
The storage system is divided into modular storage units that can be independently configured and expanded. Each storage unit contains multiple storage pockets arranged in levels, and additional units can be added to the ceiling-mounted system without requiring complex ground-based infrastructure changes, simplifying expansion while increasing capacity.
Data Source
AI summary
Disclosed herein is an apparatus for storing and handling an article at a ceiling, including: an internal rail configured to hang on the ceiling; a storage system configured to hang on the ceiling and including a shelf of a first row and a shelf of a second row disposed on both sides of the internal rail to face each other and a transport in/out port connected to any one of the shelf of the first row and the shelf of the second row; and an internal transfer robot configured to be movably connected to the internal rail and convey the article between any one of the shelf of the first row and the shelf of the second row and the transport in/out port.