Ceiling-Mounted Wafer Storage System with Movable Shelves
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Solution Overview
Problem
Semiconductor fabrication facilities face challenges in efficiently storing semiconductor wafers due to the high cost and space requirements of traditional storage systems, which limit the density and accessibility of storage solutions near processing tools.
Innovation Solution
A storage system utilizing movable storage shelves connected by a drive chain and guided by a rail system, with active ports for efficient loading and unloading, reduces the need for extensive clearance space and minimizes floor usage by allowing simultaneous movement of multiple shelves and flexible port configurations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If traditional large centralized stockers are used, then storage capacity is high, but floor space consumption is excessive and storage density is low
Solution Approach 1:
The storage system transitions from floor-based horizontal storage to ceiling-mounted vertical storage. Multiple storage shelves are arranged in vertical layers along a ceiling track, utilizing the third dimension (height) for storage capacity while minimizing floor space occupation. The storage shelves can be positioned at different vertical levels and accessed by a robotic arm that moves along the track.
Solution Approach 2:
Multiple storage shelves are nested vertically along the same ceiling track, with each shelf capable of holding containers. The system packs storage capacity into a compact vertical arrangement, similar to nested dolls, where multiple storage levels share the same horizontal footprint space.
2Loss of time
If smaller distributed stockers are used, then delivery time is reduced, but device complexity and cost increase due to duplication of stacker robots and controls
Solution Approach 1:
A single robotic arm serves multiple storage shelves simultaneously, performing both storage and retrieval operations across different vertical levels. This universal robot replaces multiple dedicated stacker robots, reducing system complexity while maintaining the ability to service multiple storage locations for reduced delivery time.
Solution Approach 2:
Multiple storage shelves and their associated control systems are merged into a single integrated ceiling-mounted system. The robotic arm and control unit serve all shelves collectively, consolidating what would otherwise be separate distributed stocker systems into one unified structure.
3Ease of operation
If smaller distributed stockers are used, then storage is closer to processing tools, but storage density decreases due to access clearance requirements
Solution Approach 1:
The storage system moves from horizontal floor-based access to vertical ceiling-based access. Storage shelves are positioned at different heights along the ceiling track, allowing high-density vertical stacking while maintaining accessibility through the robotic arm's vertical movement capability, eliminating the need for lateral clearance space.
Data Source
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AI summary
A storage system is disclosed to include a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves is coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions.