Air Conditioning Device with Central Duct for Uniform Chamber Temperature

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Solution Overview

Problem

The existing substrate treating apparatuses experience temperature deviations due to eccentric gas supply and heating elements, leading to thickness deviations in the process chamber.

Innovation Solution

An air conditioning device that evenly distributes gas supply from one side up, down, left, and right, using a central duct to divide the interior space into symmetric first and second spaces, with partition walls made of perforated plates, and includes upper and lateral air pockets to minimize temperature influence.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If gas is eccentrically supplied and passes through the filter, then the airflow is diverted vertically, but temperature deviations occur due to heating elements in the top process chamber

Engineering Contradiction:

Improvegas supply structureVSAvoidenvironmental temperature in process chamber

Core Design Contradiction:

Ease of operationVSTemperature

Solution Approach 1:

The interior space of the case is divided into multiple spaces (first space, second space, third space) by partition walls. The gas supply structure is segmented into multiple gas supply holes distributed across different partitions, allowing uniform gas distribution throughout the chamber rather than eccentric supply.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the case are equipped with specific functional features: the first partition has gas supply holes, the second partition has heating elements, and the third partition has cooling elements. This local differentiation ensures that each region performs its specific function while maintaining overall temperature uniformity through coordinated operation.

Inventive Principle:

Principle #3Local quality

2Productivity

If multiple heating elements are installed in the top process chamber, then the treatment process can be performed, but temperature deviations occur in the bottom process chamber

Engineering Contradiction:

Improvetreatment process capabilityVSAvoidthickness uniformity after treatment

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

Cooling elements are installed in the third partition (bottom process chamber) to counteract the heat from heating elements in the second partition (top process chamber) before temperature deviations can affect the substrate treatment. This preliminary anti-action prevents thickness deviation by maintaining uniform temperature throughout the chamber.

Inventive Principle:

Principle #9Preliminary anti-action

Solution Approach 2:

The system dynamically adjusts the operational parameters of heating and cooling elements to maintain temperature uniformity. By coordinating the heating power in the second partition with cooling power in the third partition, the system compensates for heat transfer and maintains consistent temperature across the entire process chamber.

Inventive Principle:

Principle #35Parameter changes

3Device complexity

If a single gas supply hole is used, then the structure is simple, but uniform gas distribution cannot be achieved

Engineering Contradiction:

Improvegas supply structureVSAvoidgas distribution uniformity

Core Design Contradiction:

Device complexityVSStability of the object's composition

Solution Approach 1:

The single gas supply function is segmented into multiple gas supply holes distributed across different partitions (first, second, and third partitions). This segmentation allows gas to be supplied uniformly to different regions of the chamber, achieving homogeneous gas distribution without requiring a complex external gas distribution system.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides uniform temperature airflow to the process chamber, reducing temperature deviations and ensuring consistent treatment conditions.

Implementation Method 1

an internal duct for guiding air from the inlet to a center of the case such that the air introduced through the inlet is uniformly supplied to an interior space of the case

Methodology Applied

Scientific EffectFluid flow:

Implementation Method 2

the central duct may include a first partition wall that is in contact with the first space and a second partition wall that is in contact with the second space, and the first partition wall and the second partition wall may be made of perforated plates

Methodology Applied

Scientific EffectPermeation: Permeation

Implementation Method 3

an air conditioning device capable of minimizing temperature influence in a periphery region

Methodology Applied

Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS20250216800A1Air conditioner and substrate treating apparatus including the same

Publication Date: 2025.07.03 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

Disclosed is an air conditioning device for providing downward airflow from an upper portion of a process chamber having a treatment space in which a first treating unit and a second treating unit are disposed side by side to the treatment space, the air conditioning device including: a case having an inlet through which air is introduced at one side, and having an opening at a lower surface for the air introduced through the inlet to flow downwardly; and an internal duct for guiding air from the inlet to a center of the case such that the air introduced through the inlet is uniformly supplied to an interior space of the case.