Ceramic Substrate Adaptive Mirror for High-Power Laser Wavefront Modulation

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Solution Overview

Problem

Existing adaptive mirrors for high-power laser wavefront modulation using metallic substrates face manufacturing complexity and thermal expansion issues, which weaken piezoelectric actuator performance.

Innovation Solution

A ceramic substrate-based adaptive mirror with integrated cooling and piezoelectric actuators, utilizing low thermal expansion materials like LTCC and glass ceramics, and structured cooling channels to minimize thermal expansion and enhance actuator efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If metallic substrates (copper, tungsten) are used for adaptive mirrors, then good thermal conductivity is achieved, but high thermal inherent expansion occurs which weakens piezoelectric actuator performance

Engineering Contradiction:
Improvethermal conductivityVSAvoidactuator performance
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent uses ceramic substrates (such as aluminum oxide, aluminum nitride, or silicon carbide) instead of metallic substrates. These ceramic materials provide both good thermal conductivity and low thermal expansion coefficients, thereby maintaining actuator performance while effectively conducting heat away from the mirror surface.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The invention changes the material parameters by selecting ceramics with specific thermal properties - particularly low thermal expansion coefficients (below 10×10^-6/K) and adequate thermal conductivity. This parameter optimization resolves the contradiction between thermal management and actuator performance.

Inventive Principle:
Principle #35Parameter changes

2Temperature

If metallic substrates are used for adaptive mirrors, then good thermal conductivity is achieved, but manufacturing complexity increases

Engineering Contradiction:
Improvethermal conductivityVSAvoidmanufacturing complexity
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The patent employs ceramic substrates that can be manufactured using established ceramic processing techniques such as sintering, injection molding, or extrusion. These methods are well-established in industry and can produce complex geometries with integrated cooling channels, thereby reducing manufacturing complexity compared to precision metal machining while maintaining thermal conductivity.

Inventive Principle:
Principle #40Composite materials

3Strength

If great substrate height is used, then structural stability is improved, but the effect of piezoelectric actuators is weakened

Engineering Contradiction:
Improvestructural stabilityVSAvoidactuator effect
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The invention optimizes the substrate height parameter to a specific range that balances structural stability and actuator effectiveness. By using ceramic materials with high mechanical strength-to-density ratios, the substrate can achieve adequate stiffness at reduced heights, allowing piezoelectric actuators to effectively influence the mirror surface geometry.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The ceramic substrate adaptive mirror offers simplified production, reduced thermal expansion, and improved piezoelectric actuator performance, enabling effective modulation of high-power laser wavefronts with reduced manufacturing complexity.

Implementation Method 1

the substrate material has a maximum thermal expansion of 2×10^-6 to 10×10^-6 K^-1

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

at least one cooling device which is integrated in the substrate or is disposed on one of the surfaces of the substrate

Methodology Applied
Scientific EffectCooling: Cooling

Implementation Method 3

at least one piezoelectric actuator which is disposed on the rear-side of the substrate

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS8480243B2Adaptive mirror and method for the production thereof
Publication Date: 2013.07.09 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV
  • US8480243B2 patent drawing
  • US8480243B2 patent drawing

AI summary

The invention relates to an adaptive mirror based on a ceramic substrate having a corresponding reflector and piezoelectric actuators, a cooling device being integrated in the substrate. The invention likewise relates to a method for the production of such mirrors. The mirrors according to the invention are used for the modulation or deformation of a laser wavefront of high power.