Multi-Layer Ceramic Carrier Electrostatic Chuck Design
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Solution Overview
Problem
The configuration of ceramic members with both clamping electrodes and electric heating elements integrated into multiple sintered layers faces challenges in wiring layout and shape limitations, leading to insufficient temperature control and interference with electrostatic attraction forces.
Innovation Solution
A ceramic member design with clamping electrodes on one layer and electric heating elements on another, separated layer, using power feed ports and vias for efficient power supply, allowing for flexible arrangement and effective temperature control without interfering with electrostatic attraction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If both clamping electrodes and electric heating elements are integrated inside a ceramic member obtained by integrally sintering multiple ceramic layers, then the functional integration is improved, but the wiring layout becomes difficult and the arrangement flexibility is limited
Solution Approach 1:
The patent divides the ceramic member into multiple separate ceramic layers, with clamping electrodes formed on some layers and electric heating elements formed on other layers. This segmentation allows independent optimization of each component's wiring layout while maintaining functional integration through the layered structure, resolving the contradiction between functional integration and wiring layout complexity.
Solution Approach 2:
The patent utilizes the third dimension (layer stacking direction) to separate the wiring paths of clamping electrodes and electric heating elements. By forming electrodes and heating elements on different layers, the wiring can be routed independently in the planar direction without interference, while the vertical stacking provides the integration function. This dimensional separation resolves the wiring layout complexity issue while maintaining functional integration.
2Temperature
If the arrangement and shape of electric heating elements are optimized for temperature control, then temperature control effectiveness is improved, but the arrangement and shape of clamping electrodes are limited which interferes with electrostatic attraction force
Solution Approach 1:
The patent segments the functional elements into different ceramic layers: clamping electrodes on one layer and electric heating elements on another. This allows each component to be independently optimized for its specific function without compromising the other, resolving the contradiction between temperature control effectiveness and electrostatic attraction force.
Solution Approach 2:
The patent introduces intermediate ceramic layers between the clamping electrodes and electric heating elements. These intermediate layers act as mediators that electrically isolate the two functional elements while allowing thermal coupling for temperature control. This enables independent optimization of electrode arrangement for electrostatic attraction and heating element arrangement for temperature control.
3Device complexity
If clamping electrodes and electric heating elements are formed on the same ceramic layer, then the device structure is simplified, but the wiring layout becomes difficult and functional performance is compromised
Solution Approach 1:
The patent segments the device into multiple ceramic layers with different functional elements on different layers. This segmentation maintains relatively simple device structure while enabling independent wiring layouts and optimal functional performance, resolving the contradiction between structural simplicity and functional reliability.
Solution Approach 2:
The patent moves different functional elements to different layers in the vertical dimension, allowing planar wiring layouts to be optimized independently for each function without interference. This dimensional separation maintains device structural simplicity while significantly improving functional performance and wiring layout feasibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances temperature control and transport capacity by improving the flexibility of electric heating element arrangement and electrostatic attraction force, ensuring effective temperature control and efficient handling of carried objects.
Implementation Method 1
an clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force
Implementation Method 2
an electric heating element formed on a second ceramic layer, which is more distant from a side holding the carried object than the first ceramic layer among the plurality of ceramic layers, and configured to generate heat using electric power
Data Source
AI summary
A ceramic member, in a carrier device, including: a plurality of ceramic layers; a clamping electrode formed on a first ceramic layer among the plurality of ceramic layers and inside of the plurality of ceramic layers, and configured to attract a dielectric material by electrostatic force; an electric heating element formed on a second ceramic layer, which is more distant from a side holding a carried object than the first ceramic layer among the plurality of ceramic layers, and configured to generate heat using electric power; a power feed port; a land formed on a third ceramic layer among the plurality of ceramic layers, and configured to receive electric power through the power feed port; and a via arranged to pass through at least one of the plurality of ceramic layers and provided as a conductive material to electrically connect the electric heating element with the land.