Ceramic-Coated Metallic Articles With Ozone Oxide Adhesion Layer

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Solution Overview

Problem

Metallic articles with ceramic barriers in fluid systems are prone to delamination, leading to increased costs due to scheduled inspections and cyclic removal and replacement for refurbishment.

Innovation Solution

A method of making metallic articles involves forming a workpiece body from bulk metallic materials like aluminum or nickel, creating a metallic oxide layer by exposing the material to ozone, and depositing a ceramic layer onto the oxide layer to enhance adhesion and prevent delamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a ceramic barrier coating is applied to metallic articles in fluid systems, then corrosion protection is improved, but adhesion reliability deteriorates due to delamination

Engineering Contradiction:
Improvecorrosion protectionVSAvoidcoating adhesion
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

A metallic oxide layer is introduced as an intermediary between the ceramic barrier coating and the bulk metallic material. This oxide layer, formed by exposing the metallic article to ozone, serves as a bonding interface that improves adhesion between the ceramic coating and the metal substrate, preventing delamination while maintaining corrosion protection.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The surface chemistry and physical properties of the metallic article are changed by forming a metallic oxide layer through ozone exposure. This parameter change in the surface composition creates a more adhesive substrate for the ceramic coating, resolving the adhesion problem while preserving the protective function.

Inventive Principle:
Principle #35Parameter changes

2Duration of action of stationary object

If ceramic barrier coatings are used on metallic articles, then service life is extended through corrosion resistance, but maintenance costs increase due to scheduled inspection and cyclic replacement

Engineering Contradiction:
Improveservice lifeVSAvoidmaintenance and replacement costs
Core Design Contradiction:
Duration of action of stationary objectVSLoss of substance

Solution Approach 1:

The metallic oxide layer acts as a stable intermediary that prevents delamination, thereby extending the actual service life of the ceramic-coated metallic article. This eliminates the need for scheduled replacement and reduces maintenance costs associated with cyclic removal and reapplication of coatings.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If a ceramic layer is deposited directly onto bulk metallic material, then manufacturing process is simplified, but adhesion strength is insufficient leading to delamination

Engineering Contradiction:
Improvecoating process simplicityVSAvoidcoating adhesion strength
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

The metallic oxide layer serves as a simple intermediary step that can be achieved through straightforward ozone exposure, maintaining ease of manufacture while dramatically improving adhesion strength. The process adds minimal complexity to the manufacturing workflow.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

Ozone, a strong oxidant, is used to rapidly form the metallic oxide layer on the surface of the metallic article. This accelerated oxidation process efficiently creates the adhesive interface without requiring complex or time-consuming treatments.

Inventive Principle:
Principle #38Strong oxidants (Accelerated oxidation)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The described method significantly improves the adhesion of the ceramic layer to the bulk metallic material, reducing the risk of delamination and extending the service life of metallic articles in fluid systems, thereby lowering maintenance and replacement costs.

Implementation Method 1

forming a metallic oxide layer overlaying the bulk metallic material from the bulk metallic material by exposing the bulk metallic material to ozone (O3)

Methodology Applied
Scientific EffectOxidation: Oxidation

Data Source

PatentUS20250183009A1Metallic articles, semiconductor processing systems having metallic articles, and methods of making metallic articles
Publication Date: 2025.06.05 ASM IP HLDG BV
  • US20250183009A1 patent drawing
  • US20250183009A1 patent drawing
  • US20250183009A1 patent drawing

AI summary

A method of making a metallic article includes forming a workpiece body from a bulk metallic material, forming a metallic oxide layer from the bulk metallic material overlaying the bulk metallic material by exposing the bulk metallic material to ozone (O3), and depositing a ceramic layer onto the metallic oxide layer. The bulk metallic material includes one of aluminum and nickel, and metallic articles and semiconductor processing systems including metallic articles are also described.