Ceramic Sintered Body Composition for Void-Free Semiconductor Bonding
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Solution Overview
Problem
Existing ceramic sintered bodies for semiconductor devices face issues with cracks and voids at the bonding interface due to suboptimal content of Zr, Mg, Si, and lack of Na or K, which affects mechanical strength and wettability with copper or aluminum plates.
Innovation Solution
A ceramic sintered body with optimized content of Zr (17.5-23.5 mass %), Hf (0.3-0.5 mass %), Al (74.3-80.9 mass %), Y (0.8-1.9 mass %), Mg (0.1-0.8 mass %), Si (0.1-1.5 mass %), Ca (0.03-0.35 mass %), and Na/K (0.01-0.10 mass %), ensuring improved mechanical strength and prevention of voids by enhancing wettability with the Cu—O eutectic liquid phase.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the content of Zr, Mg, Si is not optimized, then the manufacturing process is simpler, but cracks and voids occur at the bonding interface
Solution Approach 1:
The patent applies parameter changes by optimizing the content ranges of Zr (17.5-23.5 mass%), Mg (0.1-0.8 mass%), Si (0.1-1.5 mass%), and other components to prevent cracks and voids at the bonding interface. This systematic adjustment of compositional parameters resolves the contradiction between interface integrity and composition complexity.
Solution Approach 2:
The patent uses composite materials by combining multiple oxides (Al2O3, ZrO2, HfO2, Y2O3, MgO, SiO2, CaO, Na2O, K2O) in specific proportions to create a ceramic sintered body that prevents bonding interface defects. The composite composition achieves both reliability and controlled complexity.
2Reliability
If MgAl2O4 crystals are not generated, then the manufacturing process is simpler, but wettability with Cu-O eutectic liquid phase is lowered and voids occur
Solution Approach 1:
The patent changes parameters by controlling the content of Mg (0.1-0.8 mass%) and Si (0.1-1.5 mass%) to generate MgAl2O4 spinel crystals. This parameter optimization improves wettability with Cu-O eutectic liquid phase and prevents void formation, resolving the contradiction between reliability and process complexity.
3Strength
If the content of stabilizing components is increased to improve mechanical strength, then strength improves, but thermal conductivity improvement is limited
Solution Approach 1:
The patent uses composite materials by combining Al2O3 with controlled amounts of ZrO2 (17.5-23.5 mass%), HfO2 (0.3-0.5 mass%), and other oxides. This composite structure achieves both improved mechanical strength and enhanced thermal conductivity, resolving the contradiction between these two properties.
Solution Approach 2:
The patent applies local quality by creating MgAl2O4 spinel crystals at specific locations and concentrations within the ceramic matrix. These localized spinel phases improve mechanical strength while the overall composite structure maintains good thermal conductivity.
4Reliability
If Na or K is not added to improve manufacturing simplicity, then manufacturing is simpler, but wettability and mechanical strength are insufficient
Solution Approach 1:
The patent changes parameters by adding small controlled amounts of Na (0.01-0.10 mass%) and/or K (0.01-0.10 mass%) to the ceramic composition. This parameter adjustment improves wettability with Cu-O eutectic liquid phase and enhances mechanical strength, resolving the contradiction between reliability and compositional complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The optimized ceramic sintered body effectively prevents cracks and voids at the bonding interface, enhancing mechanical strength and thermal resistance, while maintaining suitable firing temperatures to prevent particle coarsening and porosity.
Implementation Method 1
a sintered body of at least one of Zr, Hf, Al, Y, Mg, Si, Ca, at least one of Na and K, and the balance
Data Source
AI summary
In a ceramic sintered body, the Zr content is 17.5 mass %-23.5 mass % in terms of ZrO2, the Hf content is 0.3 mass %-0.5 mass % in terms of HfO2, the Al content is 74.3 mass %-80.9 mass % in terms of Al2O3, the Y content is 0.8 mass %-1.9 mass % in terms of Y2O3, the Mg content is 0.1 mass %-0.8 mass % in terms of MgO, the Si content is 0.1 mass %- and 1.5 mass % in terms of SiO2, and the Ca content is 0.03 mass %-0.35 mass % in terms of CaO. The total content of Na and K is 0.01 mass %-0.10 mass %, when the K content is converted to K2O and the Na content is converted to Na2O. The balance content is 0.05 mass % or less in terms of oxide.