Ceramic Core Substrate With Built-In Inductor for Stable Interposers

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Solution Overview

Problem

Existing interposers face challenges in achieving high-density inductors with sufficient inductance per unit area and stable electrical characteristics, as the use of organic materials and dispersed magnetic particles limits permeability and increases variability in electrical characteristics.

Innovation Solution

A core substrate with a ceramic substrate, sintered metal conductor portions, and ceramic magnetic material portions, where the magnetic material is densely sintered to enhance permeability and the conductor is made of sintered metal to stabilize electrical characteristics, eliminating the use of resin-dispersed magnetic particles and plating films.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If magnetic particles are dispersed in resin to form the magnetic material portion, then the inductor can be manufactured using conventional techniques, but the permeability is limited due to low filling factor of magnetic particles

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidpermeability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent changes the physical state and density parameters of the magnetic material from dispersed particles in resin to densely sintered ceramic. This parameter change increases the filling factor from typical resin-dispersed values (usually <50%) to dense sintered values (>90%), thereby significantly improving permeability while maintaining manufacturability through established ceramic sintering processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite materials by combining sintered metal conductor portions with sintered ceramic magnetic material portions. This composite approach allows the magnetic material to achieve high density and permeability through sintering, while the sintered metal conductor provides stable electrical characteristics, resolving the contradiction between ease of manufacture and reliability

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If plating film is used for the conductor portion, then the inductor can be manufactured with conventional plating processes, but the electrical characteristics show high variation

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidelectrical characteristics stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent changes the conductor material from plating film to sintered metal. This parameter change transforms the conductor from a thin, variable-thickness plating layer to a dense, homogeneous sintered metal structure. The sintering process eliminates porosity and density variations inherent in plating, resulting in stable electrical characteristics while maintaining compatibility with conventional ceramic processing

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite materials by using sintered metal for the conductor portion alongside sintered ceramic for the magnetic material portion. This composite approach ensures both portions are manufactured through compatible sintering processes, achieving uniform density and stable electrical characteristics throughout the inductor structure

Inventive Principle:
Principle #40Composite materials

3Area of moving object

If the size of the inductor is reduced to achieve high-density layout, then the footprint is reduced, but the inductance decreases due to reduced magnetic material volume

Engineering Contradiction:
ImprovefootprintVSAvoidinductance
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The patent changes the density parameter of the magnetic material from low-density resin-dispersed magnetic particles to high-density sintered ceramic. This parameter change allows the magnetic material to achieve much higher permeability in a smaller volume, enabling the inductor to maintain sufficient inductance while occupying less area for high-density layouts

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by concentrating the magnetic material properties within the sintered ceramic structure. The sintering process creates a locally optimized high-permeability region that maximizes inductance generation within the available space, allowing reduced footprint without sacrificing inductance

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for the construction of interposers with high inductance per unit area and stable electrical characteristics, reducing warpage and improving manufacturing yields while maintaining high permeability and low electrical loss.

Implementation Method 1

The conductor portion is made of sintered metal

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

The magnetic material portion is made of ceramics

Methodology Applied
Scientific EffectFerromagnetism: Ferromagnetism

Implementation Method 3

the magnetic material is densely sintered to enhance permeability

Methodology Applied
Scientific EffectSintering: Sintering

Data Source

PatentUS20230343685A1Core substrate and interposer
Publication Date: 2023.10.26 NGK INSULATORS LTD
  • US20230343685A1 patent drawing
  • US20230343685A1 patent drawing
  • US20230343685A1 patent drawing

AI summary

A core substrate is a core substrate with a built-in inductor for constructing an interposer to which a semiconductor element is mounted. The core substrate includes: a ceramic substrate; a conductor portion; and a magnetic material portion. The ceramic substrate has a first surface, a second surface opposite the first surface in a thickness direction, and a through hole between the first surface and the second surface. The conductor portion extends through the through hole. The magnetic material portion surrounds the conductor portion within the through hole, and is made of ceramics. The conductor portion is made of sintered metal.