Conductive Ceramic E-Field Blocking Plate for Cleaner Plasma Processing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Metallic electric field blocking plates in plasma generators degrade quickly under typical use conditions, leading to potential contamination in semiconductor processing chambers.
Innovation Solution
Replace metal electric field blocking plates with electrically conductive ceramics having a bulk resistivity of less than about 5 ohm/cm, such as doped silicon carbide, to enhance resilience and reduce contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If metallic electric field blocking plates are used, then electrical conductivity is achieved, but degradation occurs quickly leading to contamination
Solution Approach 1:
The patent changes the material parameters by transitioning from metallic materials to ceramic materials for the electric field blocking plate. This parameter change fundamentally alters the degradation characteristics, eliminating the quick degradation and contamination issues associated with metals while maintaining the necessary electrical conductivity through careful material selection and doping.
Solution Approach 2:
The patent employs composite material strategies by using ceramics with specific compositional modifications (doping with conductive materials) to achieve both the electrical conductivity required for E-field blocking and the chemical stability needed to prevent degradation and contamination in the plasma environment.
2Duration of action of stationary object
If protective coatings are applied to metal plates, then degradation is minimized, but contamination source remains
Solution Approach 1:
The patent extracts and eliminates the problematic coating layer entirely by transitioning to ceramic materials that inherently provide both the required electrical conductivity and chemical stability. This removes the source of coating degradation and contamination while maintaining protective functionality through the bulk ceramic material properties.
3Reliability
If metal plates are used for E-field blocking, then electrical conductivity is maintained, but frequent maintenance is required
Solution Approach 1:
The patent changes the material parameters by transitioning from metallic materials to ceramic materials for the electric field blocking plate. This parameter change fundamentally alters the degradation characteristics, eliminating the quick degradation and contamination issues associated with metals while maintaining the necessary electrical conductivity through careful material selection and doping.
Solution Approach 2:
The ceramic material inherently provides both electrical conductivity and resistance to plasma environment degradation without requiring protective coatings or frequent replacement. The material's intrinsic properties enable it to maintain functionality over extended periods, reducing maintenance requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of conductive ceramics extends the lifetime of the electric field blocking plates, reducing the need for frequent maintenance and minimizing contamination in semiconductor processing systems.
Implementation Method 1
The electrical conductivity of the electric field blocking plate allows the plate to maintain an effective current to neutralize the electric field generated by the auxiliary chamber electrode
Data Source
AI summary
An electric field blocker plate which includes an electrically conductive ceramic having a bulk resistivity of less than about 5 ohm/cm. A semiconductor processing system which includes the electric field blocker plate is also disclosed.