Bent Ceramic Electrode Structure for High-Concentration Ozone
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Solution Overview
Problem
Conventional ozone generators using ceramic electrodes are inadequate for advanced semiconductor fabrication due to issues with silicon oxide layer formation and high aspect ratio structures, necessitating a new approach for efficient ozone production.
Innovation Solution
A ceramic electrode structure comprising a first and second ceramic body with a metal electrode and an inorganic bonding material, where the second ceramic body is bent to create a concave and convex surface, and an inorganic bonding material with specific elemental composition for enhanced bonding and hardness, facilitating high-concentration ozone generation suitable for semiconductor applications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional ceramic electrode structures are used for ozone generation, then the structure is simple and easy to manufacture, but the ozone concentration is insufficient for advanced semiconductor fabrication requirements
Solution Approach 1:
The electrode structure is divided into multiple ceramic bodies (first ceramic body and second ceramic body) with distinct functions. The first ceramic body serves as the main electrode structure while the second ceramic body provides additional ozone generation surface and structural support, enabling higher ozone concentration output through segmented functional zones
Solution Approach 2:
The patent employs composite material construction by combining multiple ceramic materials with different properties in the electrode structure. The first and second ceramic bodies may use different ceramic compositions optimized for their respective functions, creating a composite structure that enhances overall ozone generation performance while maintaining structural integrity
2Productivity
If high voltage current is applied to generate high-concentration ozone, then ozone production increases, but heat generation and energy loss increase
Solution Approach 1:
The ceramic electrode structure is segmented into multiple sections that can distribute the electrical current more evenly. This segmentation reduces localized current density and heat concentration, allowing high voltage application without excessive heat generation in any single region, thereby maintaining high ozone production efficiency with reduced energy loss
Solution Approach 2:
The patent optimizes physical parameters of the ceramic electrode structure including porosity, surface area, and electrical conductivity to enhance ozone generation efficiency. By adjusting these parameters, the structure achieves higher ozone production at lower voltage levels or with reduced heat generation, improving the ratio of useful output to energy input
3Duration of action of stationary object
If the ceramic electrode structure operates for extended periods, then production continuity improves, but durability and lifespan become concerns due to thermal stress and material degradation
Solution Approach 1:
The electrode structure is divided into multiple ceramic bodies that can independently withstand thermal stress. This segmentation prevents stress concentration in a single continuous structure, reducing the risk of catastrophic failure and extending operational lifespan through distributed stress management
Solution Approach 2:
The ceramic material composition and structural design incorporate thermal expansion compensation and stress distribution features that preemptively cushion against thermal shock and mechanical stress. This beforehand cushioning prevents crack formation and material degradation during extended operation, maintaining reliability and durability over time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ceramic electrode structure provides high-concentration ozone generation with improved heat dissipation and durability, ensuring effective ozone distribution and prolonged lifespan of the ozone generator, suitable for semiconductor fabrication processes.
Implementation Method 1
an inorganic bonding material filled in a gap between the first ceramic body and the second ceramic body and surrounds the metal electrode
Implementation Method 2
an ozone generator generates ozone by a high-voltage current flowing through a ceramic electrode and a tungsten electrode
Data Source
AI summary
This disclose provides a ceramic electrode structure including a first ceramic body, a second ceramic body, a metal electrode, and an inorganic bonding material. The second ceramic body is disposed to be corresponding to the first ceramic body. The metal electrode is disposed between the first ceramic body and the second ceramic body. The inorganic bonding material is filled in a gap between the first ceramic body and the second ceramic body and surrounds the metal electrode. The second ceramic body is bent to have a concave surface facing the first ceramic body and a convex surface that is opposite to the concave surface. A plurality of components of the inorganic bonding material comprise oxygen, sodium, magnesium, calcium, aluminum and silicon.