Ceramic End Effector Mounting Plate for Crack Reduction

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing alumina end effectors in robotic systems used for transporting semiconductor wafers and other substrates are prone to high rates of breakage due to bending stresses during orientation adjustments, which can lead to cracking.

Innovation Solution

A robot subassembly with a mounting plate that allows adjustable orientation relative to the robot component, using metal members with high ductility and elasticity to accommodate bending stresses, and a ceramic or glass end effector securely clamped between co-parallel surfaces to minimize compressive stresses, thereby reducing the likelihood of cracking.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the end effector is made of alumina material to accommodate high temperatures and corrosive environments, then the end effector can withstand harsh operating conditions, but the end effector becomes prone to high rates of breakage due to brittleness

Engineering Contradiction:

Improveresistance to high temperature and corrosionVSAvoidresistance to breakage

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The patent employs a composite structure where a brittle ceramic or glass end effector is coupled to a mounting plate made of metal (such as stainless steel or aluminum alloy) that possesses high ductility and elasticity. This composite arrangement allows the ceramic end effector to maintain its superior heat and corrosion resistance while the metal mounting plate absorbs bending stresses and impacts, preventing crack propagation in the brittle component.

Inventive Principle:

Principle #40Composite materials

2Adaptability or versatility

If the end effector orientation is adjusted during robotic transport, then the end effector can be properly aligned with manufacturing tools, but bending stresses cause cracking in the ceramic material

Engineering Contradiction:

Improveorientation adjustment capabilityVSAvoidresistance to cracking

Core Design Contradiction:

Adaptability or versatilityVSStrength

Solution Approach 1:

The mounting plate serves as an intermediary element between the robot wrist and the ceramic end effector. It provides the necessary orientation adjustment capability while acting as a stress buffer that protects the brittle end effector from cracking during adjustments. The metal mounting plate can elastically deform to accommodate orientation changes without transmitting damaging bending stresses to the ceramic component.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Stability of the object's composition

If the end effector is securely clamped to prevent movement, then the end effector remains stable during transport, but the clamping forces may induce compressive stresses that could lead to cracking

Engineering Contradiction:

Improvestability during transportVSAvoidresistance to compressive stress cracking

Core Design Contradiction:

Stability of the object's compositionVSStrength

Solution Approach 1:

The patent modifies the clamping mechanism to apply compressive forces in a controlled manner. By designing the mounting plate with co-parallel clamping surfaces and appropriate friction characteristics, the system maintains stable clamping forces that prevent movement during transport while distributing stresses uniformly to avoid localized cracking. The metal mounting plate's ductility allows it to accommodate clamping forces without transmitting harmful stress concentrations to the ceramic end effector.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces or eliminates cracking of ceramic or glass end effectors while allowing for necessary roll, pitch, and vertical orientation adjustments, ensuring the end effectors can be properly aligned with manufacturing tools without breaking.

Implementation Method 1

using metal members with high ductility and elasticity to accommodate bending stresses

Methodology Applied

Scientific EffectElasticity: Elasticity

Implementation Method 2

a ceramic or glass end effector securely clamped between co-parallel surfaces to minimize compressive stresses

Methodology Applied

Scientific EffectCompression: Compression

Data Source

PatentUS10090188B2Robot subassemblies, end effector assemblies, and methods with reduced cracking

Publication Date: 2018.10.02 APPLIED MATERIALS INC

AI summary

A robot subassembly including roll, pitch, and/or vertical orientation adjustability capability of a ceramic or glass end effector. The robot subassembly includes a robot component, a mounting plate coupled to the robot component, wherein the mounting plate includes adjustable orientation relative to the robot component, and a brittle ceramic or glass end effector coupled to the mounting plate. Methods of adjusting orientation between a robot component and the end effector, as well as numerous other aspects are disclosed.