Ceramic Filter Membrane Pore Control for Semiconductor Fluids
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Solution Overview
Problem
Existing filter membranes used in semiconductor manufacturing often have random pore sizes and shapes, leading to inefficiencies in removing contaminants and particles, which can result in defects and reduced yield in integrated circuit production.
Innovation Solution
A filter membrane made of ceramic materials like aluminum oxide with substantially uniform pore sizes and shapes, optimized for specific applications by adjusting the diameter, variation, and arrangement of the pores, and coated with materials for enhanced acid and alkali resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional filter membranes with random pore structures are used, then manufacturing is simpler, but particle removal efficiency deteriorates
Solution Approach 1:
The patent employs a porous ceramic membrane with controlled pore structure to achieve efficient particle removal. The membrane contains numerous pores with diameters of 0.01 to 10 micrometers, arranged in a regular pattern, which enables effective filtration of particles while maintaining structural integrity and manufacturability
Solution Approach 2:
The patent optimizes specific parameters of the porous membrane including pore diameter (0.01-10 micrometers), pore density (10^4 to 10^8 pores per cm²), and thickness (1 to 1000 micrometers) to achieve the desired balance between particle removal efficiency and manufacturing complexity. These parameter adjustments allow tailored filtration performance for different semiconductor manufacturing applications
2Manufacturing precision
If filter membranes with smaller pore sizes are used to capture finer particles, then particle removal efficiency improves, but fluid flow resistance increases
Solution Approach 1:
The patent applies different pore sizes in different regions or layers of the filter membrane system. The ceramic membrane contains pores with diameters ranging from 0.01 to 10 micrometers, allowing smaller pores to capture fine particles while larger pores maintain adequate fluid flow. This local variation in pore quality optimizes both filtration precision and productivity
Solution Approach 2:
The patent uses a composite structure combining porous ceramic material with specific pore size distribution. The ceramic provides mechanical strength and chemical stability, while the controlled pore structure (0.01-10 micrometer range) enables simultaneous achievement of fine particle capture and acceptable fluid flow rates through the combined effect of multiple pore sizes
3Reliability
If ceramic filter membranes are used to improve chemical resistance, then reliability in harsh environments improves, but manufacturing complexity increases
Solution Approach 1:
The patent employs porous ceramic materials (such as alumina, silica, or zirconia) that inherently provide excellent chemical resistance and stability in harsh semiconductor manufacturing environments. The porous structure is formed through controlled sintering processes that create the desired pore architecture while maintaining the material's chemical inertness
Solution Approach 2:
The patent controls manufacturing parameters including sintering temperature (1000-1800°C), pore-forming agent concentration, and pressing pressure to achieve the desired pore structure (0.01-10 micrometer pores with density of 10^4 to 10^8 per cm²). These parameter optimizations enable reproduction of the ceramic membrane structure with consistent performance, reducing manufacturing complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The uniform ceramic filter membranes effectively capture particles as small as 0.1 micrometers, improving the purity of fluids used in semiconductor manufacturing and enhancing the yield and reliability of integrated circuit production.
Implementation Method 1
The uniform ceramic filter membranes effectively capture particles as small as 0.1 micrometers, improving the purity of fluids used in semiconductor manufacturing
Data Source
AI summary
A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane made of a ceramic material, and a plurality of through holes. The base membrane is coated with a coating material.