Ceramic Flow Path Member with Low Resistance Portion for Electrostatic Discharge Suppression
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Solution Overview
Problem
The challenge is to effectively suppress electrostatic discharge in semiconductor manufacturing processes without the volatility issues associated with using a charge relaxation agent like alcohol, which is difficult to control in concentration.
Innovation Solution
A flow path member with a ceramic base and low resistance portions having a surface resistance less than 1X10^7 Ω/sq, where the low resistance portions are strategically placed along the flow path to efficiently remove static electricity, and a heat exchanger with a metal plate for enhanced electrical reliability and heat exchange efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a charge relaxation agent like alcohol is added to the fluid to suppress static electricity, then electrostatic discharge can be suppressed, but the concentration of the charge relaxation agent becomes difficult to control due to its volatility
Solution Approach 1:
The patent extracts the charge relaxation function from the fluid and transfers it to the flow path member structure itself. By forming a low resistance portion directly on the flow path member, the charge relaxation capability is built into the hardware rather than relying on chemical additives in the fluid, thereby eliminating concentration control issues while maintaining electrical reliability
Solution Approach 2:
The low resistance portion acts as an intermediary between the fluid and the flow path member. Instead of adding charge relaxation agents to the fluid, the patent introduces a conductive layer on the flow path member surface that mediates the discharge of static electricity from the fluid, solving both the reliability and control precision problems
2Reliability
If ceramics are used as the flow path member material to achieve good insulation property, then corrosion resistance and durability are improved, but electrostatic discharge becomes more likely due to high insulation
Solution Approach 1:
The patent applies local quality by creating a low resistance portion at specific locations on the ceramic flow path member. The bulk ceramic material maintains its insulating and corrosion-resistant properties, while the localized conductive layer on the flow path surface provides charge relaxation capability, thus resolving the contradiction between insulation and electrostatic discharge prevention
Solution Approach 2:
The flow path member becomes a composite structure combining ceramic material with a conductive coating layer. The ceramic base provides corrosion resistance and durability, while the conductive coating layer (such as metal or carbon) provides charge relaxation, creating a multi-functional composite that resolves the contradiction between insulation and electrostatic discharge
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a flow path member with high electrical reliability, effectively suppressing electrostatic discharge and ensuring reliable semiconductor manufacturing processes without the volatility issues of charge relaxation agents, while maintaining high heat exchange efficiency and durability.
Implementation Method 1
a low resistance portion whose surface resistance is less than 1×10^7Ω/sq in at least a part of the flow path. Accordingly, even if a fluid supplied to the flow path is charged with static electricity before being supplied, the static electricity can be removed at the low resistance portion and the electrostatic discharge can be suppressed
Data Source
Figure 1
Figure 2(a)~2(b)
Figure 3(a)~3(b)
AI summary
[Object] Provided are a flow path member with high electrical reliability which, even if a fluid charged with static electricity flows therein, can suppress electrostatic discharge, and a heat exchanger and a semiconductor manufacturing apparatus which include the flow path member. [Solution] A flow path member 1 includes a flow path 4 which has an inlet and an outlet in a base made of ceramics, and a low resistance portion whose surface resistance is less than 1X107 Ω/sq in at least a part of the flow path 4. According to the flow path member, even if a fluid is charged with static electricity before being supplied, the static electricity can be removed at the low resistance portion and the electrostatic discharge can be suppressed, and thereby the flow path member can have high electrical reliability.