Ceramic Fluid Resistance Element With Metal Covering for Stable Flow

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Solution Overview

Problem

Existing fluid resistance elements, particularly those made of metal and ceramic, face challenges in achieving uniform resistance characteristics and stability when incorporated into fine flow paths, with ceramic elements being prone to damage and metal elements experiencing thermal expansion issues.

Innovation Solution

A fluid resistance element comprising a ceramic flow path forming member with a metal covering member, allowing for high-dimensional accuracy and stability, with the ceramic member processed into pieces for uniform resistance and the metal covering providing a buffer during assembly, enabling secure fitting without damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a ceramic fluid resistance element is fitted into a very thin flow path without a gap, then the thermal expansion coefficient is low and corrosion resistance is high, but the ceramic element is broken or damaged

Engineering Contradiction:
Improvecorrosion resistanceVSAvoidfragility during installation
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

A metal covering member is introduced as an intermediary between the ceramic flow path forming member and the flow path wall. This metal layer absorbs installation stress and prevents direct contact between the brittle ceramic and the flow path wall, eliminating the damage risk while maintaining the corrosion resistance benefits of ceramic

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention creates a composite structure combining ceramic and metal materials. The ceramic inner layer provides corrosion resistance and low thermal expansion, while the metal outer layer provides mechanical protection and stress absorption, achieving both reliability and strength simultaneously

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If a metal slit plate is sandwiched between covering plates, then the flow path can be formed, but the slit plate is slightly bent and resistance characteristics are changed

Engineering Contradiction:
Improveflow path formationVSAvoiddimensional accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The invention changes the material parameter from metal to ceramic for the flow path forming member. Ceramic materials maintain their dimensional stability and resistance characteristics under clamping pressure, preventing the bending and characteristic changes that occur with metal slit plates while still allowing flow path formation

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If a ceramic fluid resistance element is used for ultra-low flow rate measurement, then measurement precision is improved, but the element is prone to damage during incorporation

Engineering Contradiction:
Improveflow rate measurement accuracyVSAvoiddurability during installation
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The metal covering member serves as a protective intermediary that enables the fragile but precise ceramic element to be installed and used for ultra-low flow rate measurement without damage risk

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The composite structure combines the measurement precision advantages of ceramic with the mechanical durability advantages of metal, making ultra-low flow rate measurement practical and reliable

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS20220413522A1Fluid resistance element and fluid control device
Publication Date: 2022.12.29 HORIBA STEC CO LTD
  • US20220413522A1 patent drawing
  • US20220413522A1 patent drawing
  • US20220413522A1 patent drawing

AI summary

To make it possible to incorporate a fluid resistance element into a flow path through which a fluid flows without difficulty while enjoying advantages from forming a resistance flow path using ceramic, provided is a fluid resistance element including: a ceramic flow path forming member having one or a plurality of resistance flow paths; and a metal covering member covering an outer peripheral face of the flow path forming member.