Ceramic Force-Fit Connection for Lithography Apparatus
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Solution Overview
Problem
Interlocking ceramic-metal connection arrangements in lithography apparatuses are prone to damage due to thermal expansion and require high precision, and small connection regions can be damaged by large tensile forces.
Innovation Solution
A force-fit connection arrangement using a clamping device that directly clamps ceramic components together, preventing slippage and allowing for easy detachment and accessibility, suitable for use in vacuum environments, and utilizing ceramic components like silicon carbide to minimize damage from thermal expansion and tensile forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If metal screws are used to connect ceramic components, then the connection strength is improved, but thermal expansion causes damage to the ceramic components
Solution Approach 1:
The patent removes metal screws from the connection system entirely, replacing them with a direct ceramic-to-ceramic force-fit connection. This extraction of the problematic metal component eliminates the thermal expansion mismatch issue while maintaining connection strength through precise geometric interference fit between ceramic parts.
Solution Approach 2:
The patent changes the connection mechanism from mechanical fastening (screws) to friction-based force-fit connection. By altering the connection parameter from threaded engagement to radial interference fit, the system achieves strong connection without thermal expansion damage, as ceramics with matched thermal expansion coefficients are used throughout.
2Strength
If interlocking connection arrangements are used, then connection strength is improved, but the precision requirement increases
Solution Approach 1:
The patent merges the connection function directly into the ceramic components themselves through integrated force-fit features. By combining the structural and connection functions into single ceramic parts with built-in interference fit geometries, the system reduces the number of separate precision-matched components needed, thereby lowering overall manufacturing precision requirements.
3Area of stationary object
If small connection regions are used, then device compactness is improved, but the ceramic components are damaged by large tensile forces
Solution Approach 1:
The patent transitions from one-dimensional point or line contacts to three-dimensional volumetric force-fit connections. By creating radial interference fits that engage ceramic components across multiple dimensions (radial, axial, and circumferential), the connection region effectively increases in volume while maintaining compact external dimensions, thereby distributing tensile forces across a larger internal contact area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The force-fit connection ensures secure and durable attachment of ceramic components without damage from thermal expansion or tensile forces, maintaining precision and accessibility, while being easily detachable and suitable for vacuum use.
Implementation Method 1
The clamping device directly clamps the first and the second ceramic component against one another in a force-fit manner
Data Source
AI summary
A connection arrangement is provided for a force-fit connecting ceramic components for a lithography apparatus. The connection arrangement includes first and a second ceramic components and a clamping device. The clamping device directly clamps the first and the second ceramic component against one another in a force-fit manner.