Ceramic Heated Pedestal Multi-Zone Groove Design
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional ceramic pedestals in semiconductor processing chambers face challenges with multi-zone heating and accurate temperature control, as well as difficulties in machining grooves for electrical leads and temperature sensing devices due to their limited machinability.
Innovation Solution
A heated pedestal made of ceramic material with formed grooves, encapsulated heating elements, and a dielectric insert with channels for temperature monitoring and electrical leads, allowing for independent zone control and precise temperature measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If ceramic material is used for the pedestal body, then temperature control stability is improved, but machinability deteriorates
Solution Approach 1:
The pedestal is divided into multiple zones with independent heating elements and temperature control, allowing different regions to be optimized for different functions while maintaining overall ceramic construction for thermal stability
Solution Approach 2:
The invention changes the physical state and properties of the ceramic material through controlled heating and sintering processes to achieve the desired balance between thermal stability and machinability, forming grooves before final sintering
2Reliability
If grooves are formed in ceramic pedestal for electrical leads, then electrical connection is improved, but manufacturing complexity increases
Solution Approach 1:
Grooves for electrical leads and temperature sensing devices are formed in the ceramic pedestal before final sintering, when the material is more easily workable, simplifying the overall manufacturing process while ensuring reliable electrical connections
3Manufacturing precision
If multiple heating zones are implemented, then temperature control precision is improved, but device complexity increases
Solution Approach 1:
The heating system is segmented into multiple independent zones, each with its own heating element and temperature control, allowing precise local temperature management while maintaining a unified ceramic pedestal structure
Solution Approach 2:
A controller serves as an intermediary that coordinates multiple heating zones and temperature sensing devices, managing the complexity of multi-zone control while achieving precise temperature regulation across different pedestal regions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate multi-zone temperature control and enhanced temperature monitoring, improving the uniformity and precision of film deposition processes in semiconductor processing.
Implementation Method 1
a plurality of heating elements encapsulated within the body
Implementation Method 2
a body comprising a ceramic material
Data Source
AI summary
A method and apparatus for a heated pedestal is provided. In one embodiment, the heated pedestal includes a body comprising a ceramic material, a plurality of heating elements encapsulated within the body, and one or more grooves formed in a surface of the body adjacent each of the plurality of heating elements, at least one side of the grooves being bounded by a ceramic plate.