Ceramic Heated Support Pedestal for High-Temperature Load Lock Processing

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Solution Overview

Problem

Conventional load lock chamber support pedestals, typically made of aluminum, limit the heat that can be applied to substrates due to deformation at high temperatures and are reactive with certain gases used in etch processes, hindering advanced electronic device manufacturing.

Innovation Solution

A heated support pedestal made of ceramic material with a support arm and vacuum conduit, capable of heating substrates up to 550 degrees Celsius, integrated into a dual load lock chamber with a remote plasma source for processing, allowing for high-temperature processing and exposure to reactive species without deformation or reactivity issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If aluminum material is used for support pedestal, then ease of manufacture is improved, but temperature resistance deteriorates

Engineering Contradiction:

Improveease of manufactureVSAvoidtemperature resistance

Core Design Contradiction:

Ease of manufactureVSTemperature

Solution Approach 1:

The support pedestal is constructed from composite materials including a ceramic body (such as aluminum oxide, aluminum nitride, or silicon carbide) that provides high temperature resistance, combined with metal components (such as stainless steel or molybdenum) for structural support. This composite structure enables the pedestal to withstand temperatures up to 550 degrees Celsius while maintaining mechanical integrity, resolving the contradiction between ease of manufacture and temperature resistance.

Inventive Principle:

Principle #40Composite materials

2Ease of manufacture

If aluminum material is used for support pedestal, then ease of manufacture is improved, but chemical stability deteriorates

Engineering Contradiction:

Improveease of manufactureVSAvoidchemical stability

Core Design Contradiction:

Ease of manufactureVSStability of the object's composition

Solution Approach 1:

The ceramic body material (such as aluminum oxide, aluminum nitride, or silicon carbide) is inherently chemically stable and non-reactive with etch gases, while metal components provide structural support. This material selection resolves the contradiction by achieving both ease of manufacture and superior chemical stability, eliminating reactivity issues with etch process gases.

Inventive Principle:

Principle #40Composite materials

3Adaptability or versatility

If high temperature is applied to substrate, then processing capability is improved, but support pedestal deformation occurs

Engineering Contradiction:

Improveprocessing capabilityVSAvoidsupport pedestal deformation

Core Design Contradiction:

Adaptability or versatilityVSShape

Solution Approach 1:

The ceramic body material has high melting points and maintains structural integrity at temperatures up to 550 degrees Celsius, preventing deformation during high-temperature substrate processing. The metal components are selected for their thermal stability to maintain the overall structural shape, resolving the contradiction between processing capability and support pedestal deformation.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The composite material structure is designed to accommodate thermal expansion differences between ceramic and metal components through careful material selection and structural design, preventing deformation and maintaining dimensional stability during high-temperature processing cycles.

Inventive Principle:

Principle #37Thermal expansion

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables high-temperature processing of substrates up to 550 degrees Celsius without deformation and exposure to reactive species, enhancing the manufacturing capabilities of electronic devices by improving heat management and chemical processing in load lock chambers.

Implementation Method 1

a body (136) comprising a ceramic material... capable of heating substrates up to 550 degrees Celsius

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a vacuum conduit disposed within the shaft and through the body to connect with a groove pattern formed in a surface of the body

Methodology Applied

Scientific EffectVacuum pumping: Vacuum

Implementation Method 3

a remote plasma source connected to the second chamber volume for supplying a plasma to the second chamber volume

Methodology Applied

Scientific EffectPlasma generation: Plasma

Data Source

PatentUS11557500B2High temperature heated support pedestal in a dual load lock configuration

Publication Date: 2023.01.17 APPLIED MATERIALS INC

AI summary

Embodiments of the present disclosure provide a heated support pedestal including a body comprising a ceramic material, a support arm extending radially outward from a periphery of the body that is coupled to a shaft, and a vacuum conduit disposed within the shaft and through the body to connect with a surface of the body.