Ceramic Heater Blast Cleaning with Controlled Abrasive Pressure

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Solution Overview

Problem

Existing methods for removing deposits from semiconductor manufacturing apparatus components, such as heaters and electrostatic chucks, often result in surface damage or particulate contamination, affecting uniform heating performance and reproducibility.

Innovation Solution

A blast processing method using abrasive grains of silicon carbide or aluminum oxide with grain sizes #400 to #800, applied at a pressure of 40 to 150 gf/cm2, to effectively remove deposits without damaging the surface, ensuring the blasting material does not remain post-processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If blasting beads are blown to remove deposits, then deposit removal effectiveness is improved, but blasting beads may remain on the processing object causing particulate contamination

Engineering Contradiction:

Improvedeposit removal effectivenessVSAvoidparticulate contamination

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the physical parameters of the blasting material by specifying grain size range (#400 to #800) and material composition (silicon carbide or aluminum oxide), and controls blasting parameters (pressure 40 to 150 gf/cm²) to achieve effective deposit removal while preventing surface damage and minimizing particulate contamination

Inventive Principle:

Principle #35Parameter changes

2Productivity

If blasting pressure is increased to improve deposit removal, then cleaning effectiveness is improved, but surface damage to the processing object occurs

Engineering Contradiction:

Improvedeposit removal effectivenessVSAvoidsurface integrity

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent optimizes the blasting pressure parameter to a specific range (40 to 150 gf/cm²) that provides sufficient force for deposit removal while remaining below the threshold that would cause damage to the aluminum nitride surface, thus resolving the contradiction between cleaning effectiveness and surface integrity

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent applies partial action by using controlled blasting pressure that is sufficient for deposit removal but deliberately limited to avoid excessive action that would damage the surface, achieving the right balance between cleaning effectiveness and surface protection

Inventive Principle:

Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method ensures the surface integrity of the processing objects is maintained, restoring uniform heating performance and allowing for the reuse of components like ceramic heaters, electrostatic chucks, and susceptors, while preventing particulate contamination.

Implementation Method 1

a blast pressure as a pressure when the blasting material collides with the surface of the processing object is set at 40 to 150 gf/cm2

Methodology Applied

Scientific EffectAbrasion: Abrasion

Data Source

PatentUS7288020B1Method of blasting process

Publication Date: 2007.10.30 NGK INSULATORS LTD

AI summary

Disclosed is a blast processing method for removing a deposit adhered onto a surface of a ceramic heater formed of aluminum nitride by blowing a blasting material onto the surface. Abrasive grains made of silicon carbide or aluminum oxide and having a grain size of #400 to #800 are used as the blasting material, and a blast pressure as a pressure when the blasting material collides with the surface of the ceramic heater is set at 40 to 150 gf/cm2.