Ceramic Heater Powder Charging to Prevent Electrode Bending
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Solution Overview
Problem
Conventional ceramic heaters face issues with the high-frequency electrode bending due to uneven charging of ceramic powder during sintering, leading to non-flat shapes, which complicates the manufacturing process and affects the uniformity of the heating element.
Innovation Solution
A method involving separate charging and leveling of ceramic powder in a formation mold to create a molded body with distinct center and edge portions, followed by sintering, allows for the high-frequency electrode to be manufactured in a flat or convex shapes, ensuring uniform density and preventing bending.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If ceramic powder is charged uniformly into the heater-manufacturing mold during pressurized sintering, then the manufacturing process is simple, but the high-frequency electrode bends and becomes curved due to uneven density distribution
Solution Approach 1:
The mold cavity is divided into a center region and an edge region, with separate charging operations for each region. This segmentation allows different density distributions to be achieved in different areas, preventing electrode bending while maintaining process simplicity
Solution Approach 2:
Different charging densities are applied to different regions: the center region receives ceramic powder at a first density while the edge region receives powder at a second density. This local quality approach ensures uniform overall density despite different regional charging characteristics
2Shape
If additional laminating of boron nitride ceramic layer is performed to manufacture the high-frequency electrode center lower than periphery, then the electrode shape can be adjusted, but both the high-frequency electrode and heating element become bent to be convex
Solution Approach 1:
The ceramic powder is charged to different densities in the center and edge regions before sintering, pre-establishing the density distribution that will prevent bending. This preliminary action eliminates the need for subsequent corrective laminating operations
Solution Approach 2:
Different charging densities are applied locally to the center and edge regions, allowing independent control of each region's final shape while maintaining overall flatness of both the heating element and high-frequency electrode
3Reliability
If the high-frequency electrode is manufactured flat to ensure even plasma during PECVD, then the plasma uniformity is improved, but the manufacturing process becomes complex due to additional laminating steps
Solution Approach 1:
The charging process is segmented into center and edge region operations with different density parameters, enabling flat electrode formation through a single integrated process rather than multiple sequential steps
Solution Approach 2:
The charging density parameter is changed between center and edge regions, with the center charged at a first density and the edge at a second density. This parameter variation achieves the desired flat shape without additional manufacturing steps
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables easy manufacturing of ceramic heaters with high-frequency electrodes in desired shapes without precise processing, improving uniformity and preventing bending, thus enhancing the manufacturing process efficiency and product quality.
Implementation Method 1
manufacturing a molded body or pre-sintered body of the ceramic powder from the leveled ceramic powder
Implementation Method 2
integrally sintering the molded body or pre-sintered body of the ceramic powder and the second ceramic powder
Data Source
AI summary
The present disclosure relates to a method for manufacturing a ceramic heater. The method for manufacturing a ceramic heater according to the present disclosure comprises: separately charging a ceramic powder into a center portion and multiple split edge portions in a formation mold and leveling the charged ceramic powder; manufacturing a molded body or pre-sintered body of the ceramic powder from the leveled ceramic powder; disposing a high-frequency electrode or a heating element on the molded body or pre-sintered body of the ceramic powder and filling a second ceramic powder; and integrally sintering the molded body or pre-sintered body of the ceramic powder and the second ceramic powder.