Ceramic Heater Electrode Mesh Structure for Uniform Pressure Distribution
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Solution Overview
Problem
Conventional ceramic heaters used in semiconductor manufacturing develop cracks at the contact area between the high-frequency electrode and the connecting rod due to nonuniform pressure during the hot press process, leading to thermal stress and reduced reliability over time.
Innovation Solution
A ceramic heater design incorporating a high-frequency electrode with a wire-type mesh structure coupled with a sheet-type mesh structure electrode member, where the sheet-type mesh structure covers the wire-type mesh structure to ensure uniform pressure distribution during manufacturing, preventing crack formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a wire-type mesh structure high-frequency electrode is used, then electrical conductivity and plasma grounding function are improved, but nonuniform pressure distribution during hot press causes micro cracks and reduces reliability
Solution Approach 1:
The patent combines wire-type mesh structure and sheet-type mesh structure to form a composite electrode structure. The wire-type mesh provides electrical conductivity while the sheet-type mesh provides a flat contact surface, creating a composite structure that simultaneously achieves good electrical performance and uniform pressure distribution during hot press manufacturing, thereby preventing micro cracks and improving reliability
Solution Approach 2:
The patent applies different structural characteristics to different parts of the electrode: the wire-type mesh portion provides electrical conductivity and plasma grounding function, while the sheet-type mesh portion provides a flat contact surface for uniform pressure distribution. This local differentiation of structural quality resolves the contradiction between electrical performance and manufacturing precision
2Temperature
If conventional wire-type mesh electrode is used, then electrical conductivity is maintained, but thermal stress from repeated heating causes crack growth to surface
Solution Approach 1:
The composite structure of wire-type and sheet-type mesh works together to resist thermal stress: the wire-type mesh maintains electrical conductivity while the sheet-type mesh provides structural integrity and crack resistance. The combination allows the electrode to withstand repeated thermal cycling without crack propagation to the surface
Solution Approach 2:
The sheet-type mesh structure acts as a preventive measure against crack formation and propagation. By providing a flat, structurally sound contact surface, it preemptively prevents the initiation and growth of cracks that would otherwise occur during thermal cycling, cushioning against future thermal stress damage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated mesh structure effectively prevents cracks from occurring within the ceramic heater, enhancing its reliability and longevity by ensuring uniform pressure distribution during the hot press process.
Implementation Method 1
the conventional ceramic heater 1 is manufactured through a hot press process, and during the hot press process, a predetermined pressure is delivered along an axis and in a direction (for example, vertical direction in the drawing) to sinter ceramic powder
Implementation Method 2
a predetermined pressure is delivered along an axis and in a direction (for example, vertical direction in the drawing) to sinter ceramic powder
Implementation Method 3
a heating element 13 configured to generate heat energy for heating a substrate
Implementation Method 4
a high-frequency electrode (or ground electrode) 11 configured to discharge an electric current accumulated in the ceramic heater 1 to the ground during plasma generation
Data Source
AI summary
The present invention relates to a ceramic heater with improved reliability, comprising: a heater body provided with a high-frequency electrode made of a mesh type metal material, and an electrode rod connecting member that contacts the bottom surface of the high-frequency electrode; and a heater support that is mounted below the heater body and supports the heater body, wherein the high-frequency electrode comprises a first electrode member having a wire type mesh structure and a second electrode member having a sheet type mesh structure.