Ceramic Heater Printed Electrode Slits for Uniform Heating
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Solution Overview
Problem
Ceramic heaters used in semiconductor manufacturing exhibit non-uniform heat generation due to concentrated current flow in spiral-shaped printed electrodes, leading to variations in heat density and compromised uniform heating performance, potentially causing quality losses in processing targets like wafers.
Innovation Solution
The ceramic heater features slits extended from the inner to the outer circumferential side in bent portions of the printed electrode, ensuring uniform current flow and heat distribution across the heating surface, thereby enhancing heating performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a spiral-shaped printed electrode is formed continuously along the circumferential direction, then the electrode can be manufactured efficiently, but current flows concentratedly on the inner circumferential side causing non-uniform heat generation
Solution Approach 1:
The printed electrode is divided into multiple independent linear segments arranged in a spiral pattern, with slits separating adjacent segments. This segmentation prevents current concentration at bent portions while maintaining continuous heating coverage, resolving the contradiction between manufacturing efficiency and heat uniformity
Solution Approach 2:
Slits are selectively introduced at specific locations (bent portions of the spiral) where current concentration occurs, while other regions maintain continuous electrode structure. This local modification achieves uniform heat generation without compromising overall manufacturing efficiency
2Manufacturing precision
If slits are added to the printed electrode to uniform current flow, then heat generation uniformity is improved, but device complexity increases
Solution Approach 1:
The electrode is segmented into linear portions separated by slits, creating a simple modular structure that achieves uniform current distribution without complex geometry or additional components
Solution Approach 2:
Instead of trying to make the electrode follow a smooth spiral curve (which causes current concentration), the design inverts the approach by using straight linear segments with gaps, achieving uniform heating through a simpler geometric configuration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The implementation of slits in the printed electrode results in uniform current and heat density, significantly improving the heating performance and preventing quality losses in semiconductor processing, as demonstrated by reduced temperature variations across the heating surface.
Implementation Method 1
a printed electrode (film-like resistance heating body) that generates heat by being applied with a voltage
Data Source
AI summary
A ceramic heater according to the present invention includes a heating portion made of ceramics, and a cooling plate portion. In the heating portion, a belt like printed electrode is formed continuously in a spiral shape along a circumferential direction, and in the printed electrode, slits extended in a width direction of the printed electrode are provided. In such a way, a ceramic heater in which uniform heating performance in the heating surface is high can be obtained.