Ceramic Heater with Embedded Slugs for Uniform Heating
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Solution Overview
Problem
Existing electric heaters with layered construction face issues of uneven surface topography due to substrate features, leading to non-uniform heating performance and compromised dielectric integrity from excessive material removal during planarization processes.
Innovation Solution
A sintered assembly is formed using ceramic powder and slugs, with functional elements embedded within, and a material layer connected to the slugs, allowing for a monolithic substrate with embedded functional elements and slugs, utilizing hot pressing and planarization techniques to maintain uniformity and integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If a planarization process is applied to flatten the deposited film surface, then surface uniformity is improved, but excessive material is removed causing thickness deviation from design specifications
Solution Approach 1:
The substrate surface is pre-planarized before depositing the dielectric layer, eliminating the need for post-deposition planarization. This preliminary action prevents material removal from the deposited film while achieving the required surface flatness for uniform heating performance.
2Shape
If excessive material is removed during planarization, then surface flatness is improved, but dielectric integrity is compromised resulting in poor heater performance
Solution Approach 1:
The substrate surface is planarized before dielectric layer deposition, preventing the need to remove dielectric material for flatness. This preserves the complete dielectric layer thickness and maintains electrical integrity while achieving uniform surface geometry.
3Ease of manufacture
If a layered construction with deposited films is used, then manufacturing flexibility is improved, but surface unevenness from substrate features causes non-uniform heating performance
Solution Approach 1:
The substrate undergoes pre-planarization to eliminate surface features before film deposition. This ensures that subsequent deposited layers rest on a uniform surface, achieving consistent thickness and uniform heating performance while maintaining the benefits of layered construction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method results in electric heaters with a more uniform structure and improved heating performance by maintaining the designed thickness and dielectric integrity of the functional layers, enhancing the overall efficiency and reliability of the heating process.
Implementation Method 1
hot pressing a ceramic powder and a plurality of first slugs and forming the sintered assembly including a ceramic substrate and the plurality of first slugs embedded therein
Implementation Method 2
hot pressing a ceramic powder and a plurality of first slugs and forming the sintered assembly
Implementation Method 3
The step of removing excess functional material may comprise a process selected from a group consisting of a chemical mechanical planarization/polishing (CMP), etching, and polishing.
Data Source
AI summary
A heater includes a sintered assembly and a functional element disposed on one of opposing surfaces of the sintered assembly. The heater is manufactured by a method that includes hot pressing a ceramic powder and a plurality of first slugs and forming the sintered assembly including a ceramic substrate and the plurality of first slugs embedded therein, forming the functional element on the one opposing surface of the sintered assembly such that the functional element is connected to the plurality of first slugs, and forming a monolithic substrate in which the functional element and the plurality of first slugs are embedded.