Ceramic Heater Pin-Height Layout for Radial Temperature Control
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Solution Overview
Problem
Existing technologies fail to provide a uniform temperature distribution on heating surfaces while also allowing for precise control of temperature gradients in semiconductor manufacturing, leading to issues like hot spots and uneven deposition.
Innovation Solution
A ceramic heater with pin-shaped projections of varying heights, including first and second projections, forms a curved surface that supports substrates, allowing for uniform heating and controlled temperature gradients by minimizing contact and optimizing heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a protruding curved surface is provided on the heating surface to equalize temperature distribution, then local temperature distribution is improved, but the ability to provide a predetermined temperature gradient in radial direction is compromised
Solution Approach 1:
The heating surface is segmented into multiple pin-shaped projections with different heights (first, second, and third pin-shaped projections) arranged in different radial regions. This segmentation allows each region to have customized thermal characteristics, enabling both local temperature equalization and radial temperature gradient control simultaneously.
Solution Approach 2:
Different regions of the heating surface are given different local qualities through varying pin heights and densities. The first pin-shaped projections (tallest) are in the central region, second pin-shaped projections (intermediate height) are in the intermediate region, and third pin-shaped projections (shortest) are in the peripheral region. This local quality variation enables simultaneous achievement of temperature uniformity in each region and controlled temperature gradient across regions.
2Temperature
If pin-shaped projections are added to control temperature distribution, then temperature uniformity is improved, but device complexity increases
Solution Approach 1:
The temperature control function is merged into the substrate support structure itself. The pin-shaped projections serve dual purposes: they mechanically support the substrate while simultaneously controlling the temperature distribution through their varied heights and spatial arrangement. This eliminates the need for separate temperature control mechanisms.
Solution Approach 2:
The pin-shaped projections self-regulate temperature distribution through their geometric configuration. The varying heights create natural thermal pathways that automatically equalize local temperatures and establish radial gradients without requiring external control systems, sensors, or active regulation mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively equalizes local temperature distributions and provides predetermined temperature gradients, reducing hot spots and enhancing substrate handling.
Implementation Method 1
an electrode (a heating resistor) is embedded has been used. The electrode-embedded member can heat a placed substrate.
Implementation Method 2
The plurality of pin-shaped projections include first pin-shaped projections whose heights from the upper surface to respective upper ends are substantially identical to each other, and second pin-shaped projections whose heights from the upper surface to respective upper ends are each lower than the height of each of the first pin-shaped projections
Data Source
AI summary
An electrode-embedded member includes a disc-shaped base that is formed of a ceramic sintered body, an electrode embedded in the base, and a plurality of pin-shaped projections projecting upward from an upper surface of the base. The upper surface of the base is a curved surface having a shape protruding toward a center. The plurality of pin-shaped projections include first pin-shaped projections whose heights from the upper surface to respective upper ends are substantially identical to each other, and second pin-shaped projections whose heights from the upper surface to respective upper ends are each lower than the height of each of the first pin-shaped projections.