Ceramic Heater Shaft Structure for Stable Power Feed Bonding
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Solution Overview
Problem
In existing ceramic heaters used in semiconductor manufacturing, the power feeding members inserted into through-holes in the tubular shaft can deflect when stress is applied, leading to broken bonding between the power feeding members and the heating resistors.
Innovation Solution
The ceramic heater design embeds power feeding members into the peripheral wall of the tubular shaft, ensuring tight contact with the ceramic material, which prevents deflection under stress and maintains bonding with the heating resistors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If power feeding members are inserted into through-holes with space, then electrical contact between power feeding members is prevented, but the power feeding members deflect under stress and bonding with heating resistors is broken
Solution Approach 1:
The tubular shaft is divided into two separate molding stages: first molding creates the basic tubular structure, then second molding adds the power feeding member embedding portion. This segmentation allows the power feeding member to be securely embedded in a dedicated recess rather than loosely inserted, preventing deflection while maintaining electrical isolation through the ceramic structure.
Solution Approach 2:
The power feeding member is nested within an embedding portion of the tubular shaft, where it is surrounded and fixed by the ceramic material. This nesting structure provides mechanical support and prevents lateral movement, ensuring stable bonding with heating resistors while the ceramic material maintains electrical insulation.
2Ease of manufacture
If through-holes are used for power feeding members, then electrical isolation is achieved, but manufacturing complexity increases and bonding reliability decreases
Solution Approach 1:
The power feeding member embedding process is merged with the tubular shaft manufacturing process through two-stage molding. The embedding portion is formed during second molding, eliminating the need for separate through-hole creation and power feeding member insertion steps. This integration simplifies manufacturing while ensuring reliable bonding as the power feeding member is fixed during the molding process itself.
3Adaptability or versatility
If multiple heating resistors are provided, then heating coverage is improved, but power feeding becomes more complex and bonding reliability decreases
Solution Approach 1:
The tubular shaft's embedding portion serves multiple functions: it mechanically fixes power feeding members, provides electrical isolation through ceramic material, and supports multiple heating resistors simultaneously. The standardized embedding structure can accommodate any number of power feeding members, making the system universally applicable for various heating configurations without increasing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures reliable electrical connection and bonding between the power feeding members and the heating resistors, even under stress, enhancing the durability and performance of the ceramic heater.
Implementation Method 1
a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded
Data Source
AI summary
A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.