Ceramic Heater Recess Terminal Placement
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Solution Overview
Problem
As the number of zones increases in ceramic heaters for semiconductor manufacturing, arranging terminals for resistance heating elements on the rear surface of the ceramic plate becomes difficult due to space constraints, limiting the effective use of the area surrounding the tubular shaft.
Innovation Solution
A ceramic heater design that includes a recess on the rear surface of the ceramic plate within the tubular shaft region, allowing terminals to be exposed on the side surface of the recess, which increases the usable area and enables more efficient terminal placement and connection, including direct or short wiring connections for resistance heating elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the number of zones increases and more resistance heating elements are disposed in each zone, then the heating capability and temperature control precision are improved, but the difficulty of arranging terminals in the limited rear surface region worsens
Solution Approach 1:
The patent transitions from a two-dimensional terminal arrangement on the rear surface to a three-dimensional arrangement by forming a recess (groove) in the rear surface. This allows terminals to be disposed both on the bottom surface and side surfaces of the recess, effectively utilizing the vertical dimension to increase terminal capacity without expanding the horizontal footprint.
Solution Approach 2:
The terminals are nested within the recess structure, with some terminals disposed on the bottom surface and others on the side surfaces. This nested arrangement maximizes the use of available space within the shaft region, allowing multiple terminals to be accommodated in a compact configuration.
2Ease of operation
If all terminals are arranged in the within-shaft region of the rear surface, then the connection to resistance heating elements is simplified, but the effective utilization of the rear surface area deteriorates
Solution Approach 1:
The patent applies different spatial characteristics to different regions within the shaft area by creating a recess with distinct bottom and side surfaces. Terminals are strategically placed on different surfaces based on their connection requirements, optimizing both the ease of connection and the effective utilization of the rear surface area.
3Device complexity
If terminals are exposed at the within-shaft region without a recess, then the structure is simple, but the space utilization and terminal distribution flexibility are limited
Solution Approach 1:
The recess structure segments the terminal arrangement space into distinct regions (bottom surface and side surfaces), allowing terminals to be distributed more flexibly. This segmentation provides multiple exposure directions and positions, enhancing adaptability while maintaining reasonable structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively utilizes the rear surface area of the ceramic plate, allowing for easier terminal exposure and connection, improved space management, and efficient power supply to resistance heating elements, enhancing the heater's operational efficiency and usability.
Implementation Method 1
an inner-peripheral-side resistance heating element and an outer-peripheral-side resistance heating element each made of a refractory metal are embedded in a ceramic plate, and heat generations from the resistance heating elements are controlled independently of each other by supplying electric powers to the resistance heating elements
Data Source
AI summary
A ceramic heater includes a ceramic plate having a surface that serves as a wafer placement surface, resistance heating elements that are embedded in the ceramic plate, a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate, a recess that is formed in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, and terminals that are disposed to be exposed at a side surface of the recess and that supply electric power to the resistance heating element.