Ceramic Heater Refurbishment with Selective Top Replacement

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Solution Overview

Problem

Ceramic heaters used in semiconductor process chambers develop defects such as cracking, chipping, and delamination over time, rendering them unusable.

Innovation Solution

A method involving grinding off the top portion of a ceramic heater to form a ground ceramic heater, coupling a new ceramic top with a metal filler, and sealing the edge regions to refurbish the heater, optionally including new RF mesh and heating element terminals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If ceramic heaters are used continuously in semiconductor process chambers, then they provide sustained heating and substrate support, but they develop defects such as cracking, chipping, and delamination over time

Engineering Contradiction:

Improveservice life of ceramic heaterVSAvoiddefect-free operation

Core Design Contradiction:

Duration of action of stationary objectVSReliability

Solution Approach 1:

The patent applies the discarding and recovering principle by separating the defective top portion of the ceramic heater from the usable bottom portion containing heating elements. The defective top is discarded through grinding, while the valuable heating elements and lower structure are recovered and reused by bonding a new ceramic top, thereby extending the overall service life while maintaining reliability

Inventive Principle:

Principle #34Discarding and recovering

Solution Approach 2:

The ceramic heater is segmented into two distinct portions: the top portion containing the defective surface and the bottom portion containing the functional heating elements. This segmentation allows selective replacement of only the defective top section while preserving the intact heating elements, resolving the contradiction between extended duration and maintained reliability

Inventive Principle:

Principle #1Segmentation

2Reliability

If the top portion of the ceramic heater is ground off to remove defects, then defect-free surfaces are achieved, but additional processing steps and material removal are required

Engineering Contradiction:

Improvedefect-free surfaceVSAvoidnumber of processing steps

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The defective top portion is extracted from the ceramic heater through grinding, removing all surface defects in one operation. This extraction approach achieves a defect-free surface while the subsequent bonding of a new top restores the heater's structural completeness, managing the added complexity through targeted removal rather than extensive repair

Inventive Principle:

Principle #2Taking out (Extraction)

3Strength

If a new ceramic top is bonded to the ground ceramic heater, then the heater structure is restored, but bonding materials and sealing processes are introduced

Engineering Contradiction:

Improvestructural integrityVSAvoidbonding and sealing processes

Core Design Contradiction:

StrengthVSDevice complexity

Solution Approach 1:

The refurbished ceramic heater becomes a composite structure combining the original ground ceramic heater body with a new bonded ceramic top. This composite approach restores structural integrity through the bonding interface, and the added sealing layer creates a multi-layer composite that maintains both strength and defect-free operation

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

A bonding material acts as an intermediary between the ground ceramic heater and the new ceramic top, creating a strong structural connection. The sealing material serves as another intermediary that protects the bonding interface and prevents defect propagation, managing the complexity through specialized intermediary materials

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The refurbished ceramic heaters can perform high-temperature processes effectively, addressing defects and extending their usability.

Implementation Method 1

grinding off a top portion of the ceramic heater to form a ground ceramic heater

Methodology Applied

Scientific EffectAbrasion: Abrasion

Implementation Method 2

bonding a ceramic top having a new RF mesh to the first upper layer of the ground ceramic heater via a metal filler

Methodology Applied

Scientific EffectAdhesion: Adhesive

Implementation Method 3

sealing one or more edge regions of an interface between the ceramic top and the ground ceramic heater

Methodology Applied

Scientific EffectPhysical Containment: Physical Containment

Implementation Method 4

Ceramic heaters also help to generate heat and maintain a desired temperature and promote temperature uniformity of the substrate

Methodology Applied

Scientific EffectJoule Heating: Joule Heating

Implementation Method 5

promote temperature uniformity of the substrate

Methodology Applied

Scientific EffectThermal Conduction: Conduction (thermal)

Data Source

PatentUS20250220777A1Method and Apparatus of Substrate Support Repair and Refurbishment

Publication Date: 2025.07.03 APPLIED MATERIALS INC

AI summary

Methods of refurbishing ceramic heaters are provided herein. In some embodiments, a method of refurbishing a ceramic heater having one or more heating elements disposed therein includes: grinding off a top portion of the ceramic heater to form a ground ceramic heater having a first upper layer, wherein the ground ceramic heater includes the one or more heating elements disposed below the first upper layer; coupling a ceramic top to the first upper layer of the ground ceramic heater; and sealing one or more edge regions of an interface between the ceramic top and the ground ceramic heater to form a refurbished ceramic heater.